Non-volatile memory devices and methods of fabricating the same

ABSTRACT

A non-volatile memory device comprises a substrate, a control gate electrode on the substrate, and a charge storage region between the control gate electrode and the substrate. A control gate mask pattern is on the control gate electrode, the control gate electrode comprising a control base gate and a control metal gate on the control base gate. A width of the control metal gate is less than a width of the control gate mask pattern. An oxidation-resistant spacer is at sidewalls of the control metal gate positioned between the control gate mask pattern and the control base gate.

CROSS-REFERENCE TO RELATED APPLICATIONS

This U.S. non-provisional patent application claims priority under 35U.S.C. §119 of Korean Patent Application No. 10-2010-0127155, filed onDec. 13, 2010, the entire content of which is hereby incorporated byreference.

BACKGROUND

The present disclosure relates to semiconductor devices and methods offabricating the same, and more particularly, to non-volatile memorydevices and methods of fabricating the same.

Semiconductor devices enjoy widespread use in the electronics industryas a result of advantageous characteristics such as amenability tominiaturization, multi-functional capability, low manufacturing cost,and the like. Semiconductor devices can include, for example, memorydevices that store logic data, logic devices that perform logicoperations, hybrid devices that include both memory elements and logicelements, and other devices.

As the electronics industry continues to advance, the desiredperformance constraints placed on the characteristics of semiconductordevices continues to increase. For example, semiconductor devices aredriven to operate at ever-higher speeds, and with greater reliability.However, the critical dimension of patterns used in semiconductordevices continues to be reduced due to the continuing trend towardever-higher integration density. Therefore, it is increasingly difficultto realize semiconductor devices that operate at higher frequency andwith more favorable reliability.

SUMMARY

In an aspect, a non-volatile memory device comprises: a substrate; acontrol gate electrode on the substrate; a charge storage region betweenthe control gate electrode and the substrate; a control gate maskpattern on the control gate electrode; the control gate electrodecomprising a control base gate and a control metal gate on the controlbase gate; a width of the control metal gate being less than a width ofthe control gate mask pattern; and an oxidation-resistant spacer atsidewalls of the control metal gate positioned between the control gatemask pattern and the control base gate.

In some embodiments, a combined width of the control metal gate and awidth of the oxidation-resistant spacer at first and second sidewalls ofthe control metal gate is less than the width of the control gate maskpattern.

In some embodiments, a combined width of the control metal gate and awidth of the oxidation-resistant spacer at first and second sidewalls ofthe control metal gate is equal to the width of the control gate maskpattern.

In some embodiments, a width of the oxidation-resistant spacer is lessthan one-half a width of a narrowest portion of the control metal gate.

In some embodiments, the non-volatile memory device further comprises alower barrier layer pattern between the control base gate and thecontrol metal gate.

In some embodiments, the lower barrier layer pattern is of a thicknessthat is less than one-half a thickness of the control metal gate.

In some embodiments, the lower barrier layer pattern is of a width thatis less than the width of the control gate mask pattern.

In some embodiments, the non-volatile memory device further comprises anupper barrier layer pattern between the control metal gate and the gatemask pattern.

In some embodiments, the upper barrier layer pattern is of a thicknessthat is less than one-half a thickness of the control metal gate.

In some embodiments, the upper barrier layer pattern is of a width thatis less than the width of the control gate mask pattern.

In some embodiments, the control base gate includes a lower portion andan upper portion, wherein the upper portion is of a width that is lessthan a width of the lower portion.

In some embodiments, the oxidation resistant spacer covers a top surfaceand sidewall surface of the upper portion of the control base gate.

In some embodiments, the non-volatile memory device further comprises aninsulative layer on the control gate electrode.

In some embodiments, a memory cell region of the memory device includesmultiple control gate electrodes, and wherein air gaps are present inthe insulative layer between neighboring control gate electrodes.

In some embodiments, the charge storage region comprises a tunneldielectric layer on the substrate, a floating gate on the tunneldielectric layer and a blocking layer on the floating gate.

In some embodiments, the floating gate and blocking layer are patternedto have sidewalls that are aligned with sidewalls of the control basegate.

In some embodiments, the non-volatile memory device further comprises anoxidation layer on the sidewalls of the floating gate.

In some embodiments, the charge storage region comprises a tunneldielectric layer on the substrate, a dielectric charge storage layer onthe tunnel dielectric layer and a blocking layer on the dielectriccharge storage layer.

In some embodiments, the charge-storage region comprises a ONO-typestructure

In some embodiments, the dielectric charge storage layer and theblocking layer are patterned to have sidewalls that are aligned withsidewalls of the control base gate.

In some embodiments, the non-volatile memory device further comprises anoxidation layer on sidewalls of the control base gate.

In some embodiments, the memory device comprises a memory cell regionand wherein the control gate electrode and the control gate mask patternare located in the memory cell region and wherein the memory devicefurther comprises a peripheral region including: a peripheral gateelectrode on the substrate in the peripheral region; the peripheral gateelectrode comprising a peripheral base gate and a peripheral metal gateon the peripheral base gate; a peripheral gate mask pattern on theperipheral gate electrode; a width of the peripheral metal gate beingless than a width of the peripheral gate mask pattern; and anoxidation-resistant spacer at sidewalls of the peripheral metal gate andbelow the peripheral gate mask pattern.

In some embodiments, the peripheral base gate is a same material as thecontrol base gate, wherein the peripheral metal gate is a same materialas the control metal gate, and wherein the oxidation-resistant spacer atsidewalls of the peripheral metal gate is a same material as theoxidation-resistant spacer at sidewalls of the control metal gate.

In some embodiments, a thickness of the oxidation-resistant spacer atsidewalls of the peripheral metal gate is greater than a thickness ofthe oxidation-resistant spacer at sidewalls of the control metal gate.

In some embodiments, at least one of the control base gate and theperipheral base gate includes a lower portion and an upper portion,wherein the upper portion is of a width that is less than a width of thelower portion.

In some embodiments, the peripheral gate electrode further comprises: aperipheral bottom gate on the substrate between the peripheral base gateand the substrate; a peripheral gate dielectric layer between theperipheral bottom gate and the substrate; and an interlayer dielectriclayer pattern between the peripheral base gate and the peripheral bottomgate, wherein the peripheral metal gate directly contacts the peripheralbottom gate through an opening in the peripheral base gate and in thedielectric layer pattern.

In some embodiments, the oxidation-resistant spacer comprises nitride.

In some embodiments, the oxidation-resistant spacer comprises insulatingnitride.

In some embodiments, the oxidation-resistant spacer comprises a materialselected from the group consisting of silicon nitride and siliconoxynitride.

In some embodiments, the oxidation-resistant spacer comprises conductivenitride.

In some embodiments, the oxidation-resistant spacer comprises a materialselected from the group consisting of metal nitride, titanium nitride,tantalum nitride, and tungsten nitride.

In some embodiments, a height of the oxidation-resistant spacer is equalto a height of the control metal gate.

In an aspect, a non-volatile memory device comprises: a substrate; acontrol gate electrode comprising metal on the substrate; a chargestorage region between the control gate electrode and the substrate; acontrol gate mask pattern on the control gate electrode; a width of thecontrol gate electrode being less than a width of the control gate maskpattern; and an oxidation-resistant spacer at sidewalls of the controlgate electrode positioned between the control gate mask pattern and thecharge storage region.

In some embodiments, a combined width of the control gate electrode anda width of the oxidation-resistant spacer at first and second sidewallsof the control gate electrode is less than the width of the control gatemask pattern.

In some embodiments, a combined width of the control gate electrode anda width of the oxidation-resistant spacer at first and second sidewallsof the control gate electrode is equal to the width of the control gatemask pattern.

In some embodiments, a width of the oxidation-resistant spacer is lessthan one-half a width of a narrowest portion of the control gateelectrode.

In some embodiments, the non-volatile memory device further comprises alower barrier layer pattern between the charge storage region and thecontrol gate electrode.

In some embodiments, the lower barrier layer pattern is of a thicknessthat is less than one-half a thickness of the control gate electrode.

In some embodiments, the lower barrier layer pattern is of a width thatis less than the width of the control gate mask pattern.

In some embodiments, the non-volatile memory device further comprises anupper barrier layer pattern between the control gate electrode and thegate mask pattern.

In some embodiments, the upper barrier layer pattern is of a thicknessthat is less than one-half a thickness of the control gate electrode.

In some embodiments, the upper barrier layer pattern is of a width thatis less than the width of the control gate mask pattern.

In some embodiments, the non-volatile memory device further comprises aninsulative layer on the control gate electrode.

In some embodiments, a memory cell region of the memory device includesmultiple control gate electrodes, and wherein air gaps are present inthe insulative layer between neighboring control gate electrodes.

In some embodiments, the charge storage region comprises a tunneldielectric layer on the substrate, a dielectric charge storage layer onthe tunnel dielectric layer and a blocking layer on the dielectriccharge storage layer.

In some embodiments, the charge-storage region comprises a ONO-typestructure.

In some embodiments, the dielectric charge storage layer and theblocking layer are patterned to have sidewalls that are aligned withsidewalls of the control gate mask pattern.

In some embodiments, the memory device comprises a memory cell regionand wherein the control gate electrode and the control gate mask patternare located in the memory cell region and wherein the memory devicefurther comprises a peripheral region including: a peripheral gateelectrode on the substrate in the peripheral region; a peripheral gatemask pattern on the peripheral gate electrode; a width of the peripheralgate electrode being less than a width of the peripheral gate maskpattern; and an oxidation-resistant spacer at sidewalls of theperipheral gate electrode and below the peripheral gate mask pattern.

In some embodiments, the peripheral gate electrode is a same material asthe control gate electrode, and wherein the oxidation-resistant spacerat sidewalls of the peripheral gate electrode is a same material as theoxidation-resistant spacer at sidewalls of the control gate electrode.

In some embodiments, a thickness of the oxidation-resistant spacer atsidewalls of the peripheral gate electrode is greater than a thicknessof the oxidation-resistant spacer at sidewalls of the control gateelectrode.

In some embodiments, the peripheral gate electrode comprises aperipheral metal gate on, and in direct contact with, a peripheral basegate.

In some embodiments, the oxidation-resistant spacer comprises nitride.

In some embodiments, the oxidation-resistant spacer comprises insulatingnitride.

In some embodiments, the oxidation-resistant spacer comprises a materialselected from the group consisting of silicon nitride and siliconoxynitride.

In some embodiments, the oxidation-resistant spacer comprises conductivenitride.

In some embodiments, the oxidation-resistant spacer comprises a materialselected from the group consisting of metal nitride, titanium nitride,tantalum nitride, and tungsten nitride.

In some embodiments, a height of the oxidation-resistant spacer is equalto a height of the control gate electrode.

In an aspect, a non-volatile memory device comprises: a substrate; acontrol gate electrode on the substrate; a charge storage region betweenthe control gate electrode and the substrate; a control gate maskpattern on the control gate electrode; the control gate electrodecomprising a control base gate and a control metal gate on the controlbase gate; a width of the control metal gate being less than a width ofthe control base gate; and an oxidation-resistant spacer at sidewalls ofthe control metal gate positioned between the control gate mask patternand the control base gate.

In some embodiments, a combined width of the control metal gate and awidth of the oxidation-resistant spacer at first and second sidewalls ofthe control metal gate is less than the width of the control base gate.

In some embodiments, a combined width of the control metal gate and awidth of the oxidation-resistant spacer at first and second sidewalls ofthe control metal gate is equal to the width of the control base gate.

In an aspect, a method of fabricating a non-volatile memory devicecomprises: providing a charge storage layer on a substrate; providing acontrol base gate layer on the charge storage layer; providing a controlmetal gate layer on the control base gate layer; providing a controlgate mask pattern on the control metal gate layer; etching the controlmetal gate layer and the control base gate layer using the control gatemask pattern as an etch mask to form a first control metal gate patternand a control base gate pattern; etching sidewalls of the first controlmetal gate pattern to form a second control metal gate pattern, so thata width of the second control metal gate pattern is less than a width ofthe control gate mask pattern; and providing an oxidation-resistantspacer at sidewalls of the second control metal gate pattern positionedbetween the control gate mask pattern and the control base gate pattern

In some embodiments, providing the oxidation-resistant spacer comprises:providing an oxidation-resistant layer on the second control metal gatepattern at sidewalls of the second control metal gate pattern to fill anundercut region below the control gate mask pattern; and etching theoxidation-resistant layer to form the oxidation-resistant spacer.

In some embodiments, etching the oxidation-resistant layer comprisesetching using an etching process having dominant anisotropy properties.

In some embodiments, etching the sidewalls of the first control metalgate pattern to form the second control metal gate pattern comprisesetching using a dry etching process having dominant anisotropyproperties.

In some embodiments, the method further comprises, following providingthe oxidation-resistant spacers, performing a gate oxidation process onsidewalls of the control base gate pattern.

In an aspect, a method of fabricating a non-volatile memory devicecomprises: providing a charge storage region on a substrate; providing acontrol gate electrode layer comprising metal on the charge storageregion; providing a control gate mask pattern on the control gateelectrode layer; etching the control gate electrode layer using thecontrol gate mask pattern as an etch mask to form a first control gateelectrode pattern; etching sidewalls of the first control gate electrodepattern to form a second control gate electrode pattern, so that a widthof the second control gate electrode pattern is less than a width of thecontrol gate mask pattern; and providing an oxidation-resistant spacerat sidewalls of the second control gate electrode pattern positionedbetween the control gate mask pattern and the charge storage region

In some embodiments, providing the oxidation-resistant spacer comprises:providing an oxidation-resistant layer on the second control gateelectrode pattern at sidewalls of the second control gate electrodepattern to fill an undercut region below the control gate mask pattern;and etching the oxidation-resistant layer to form theoxidation-resistant spacer.

In some embodiments, etching the oxidation-resistant layer comprisesetching using an etching process having dominant anisotropy properties.

In some embodiments, etching the sidewalls of the first control gateelectrode pattern to form the second control gate electrode patterncomprises etching using a dry etching process having dominant anisotropyproperties.

In an aspect, a memory system comprises: a memory controller thatgenerates command and address signals; and a memory module comprising aplurality of memory devices, the memory module receiving the command andaddress signals and in response storing and retrieving data to and fromat least one of the memory devices, wherein each memory device comprisesa non-volatile memory device comprising: a substrate; a control gateelectrode on the substrate; a charge storage region between the controlgate electrode and the substrate; a control gate mask pattern on thecontrol gate electrode; the control gate electrode comprising a controlbase gate and a control metal gate on the control base gate; a width ofthe control metal gate being less than a width of the control gate maskpattern; and an oxidation-resistant spacer at sidewalls of the controlmetal gate positioned between the control gate mask pattern and thecontrol base gate.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings are included to provide a furtherunderstanding of the inventive concept, and are incorporated in, andconstitute a part of, this specification. The drawings illustrateexemplary embodiments of the inventive concept and, together with thedescription, serve to explain principles of the inventive concept. Inthe drawings:

FIG. 1 is a cross-sectional view illustrating a non-volatile memorydevice according to an embodiment of the inventive concept;

FIG. 2 is a cross-sectional view illustrating a modified example of anon-volatile memory device according to an embodiment of the inventiveconcept;

FIG. 3 is a cross-sectional view illustrating another modified exampleof a non-volatile memory device according to an embodiment of theinventive concept;

FIG. 4 is a cross-sectional view illustrating still another modifiedexample of a non-volatile memory device according to an embodiment ofthe inventive concept;

FIG. 5 is a cross-sectional view illustrating yet another modifiedexample of a non-volatile memory device according to an embodiment ofthe inventive concept;

FIGS. 6A through 6G are cross-sectional views illustrating a method offabricating a non-volatile memory device according to an embodiment ofthe inventive concept;

FIG. 7 is a flow chart illustrating a method of forming anoxidation-resistant spacer and gate patterns of a non-volatile memorydevice according to an embodiment of the inventive concept;

FIGS. 8A through 8D are cross-sectional views illustrating a method offabricating the non-volatile memory device shown in FIG. 5;

FIG. 9 is a cross-sectional view illustrating a non-volatile memorydevice according to another embodiment of the inventive concept;

FIG. 10 is a cross-sectional view illustrating a modified example of anon-volatile memory device according to another embodiment of theinventive concept;

FIG. 11 is a cross-sectional view illustrating another modified exampleof a non-volatile memory device according to another embodiment of theinventive concept;

FIG. 12 is a cross-sectional view illustrating still another modifiedexample of a non-volatile memory device according to another embodimentof the inventive concept;

FIGS. 13A through 13D are cross-sectional views illustrating a method offabricating a non-volatile memory device according to another embodimentof the inventive concept;

FIG. 14 is a flow chart illustrating a method of forming anoxidation-resistant spacer and gate patterns of a non-volatile memorydevice according to another embodiment of the inventive concept;

FIGS. 15A through 15C are cross-sectional views illustrating a method offabricating the non-volatile memory device shown in FIG. 12;

FIG. 16A is a cross-sectional view illustrating a nonvolatile memorydevice according to still another embodiment of the inventive concept;

FIG. 16B is an enlarged view of portion A of FIG. 16A;

FIG. 17A is a cross-sectional view illustrating a modified example of anonvolatile memory device according to still another embodiment of theinventive concept;

FIG. 17B is an enlarged view of portion B of FIG. 17A;

FIG. 18A is a cross-sectional view illustrating a nonvolatile memorydevice according to still another embodiment of the inventive concept;

FIG. 18B is an enlarged view of portion C of FIG. 18A;

FIG. 19A is a cross-sectional view illustrating a modified example of amethod of fabricating a nonvolatile memory device according to stillanother embodiment of the inventive concept;

FIG. 19B is an enlarged view of portion D of FIG. 19A;

FIG. 20 is a cross-sectional view illustrating a nonvolatile memorydevice according to yet another embodiment of the inventive concept;

FIGS. 21A and 21B area cross-sectional views illustrating a method offabricating a nonvolatile memory device according to yet anotherembodiment of the inventive concept;

FIG. 22 is a cross-sectional view illustrating a non-volatile memorydevice according to another embodiment of the inventive concept;

FIG. 23 is a cross-sectional view illustrating a modified example of anonvolatile memory device according to another embodiment of theinventive concept;

FIG. 24 is a block diagram illustrating an example of an electronicsystem including a non-volatile memory device configured in accordancewith the inventive concept; and

FIG. 25 is a block diagram illustrating an example of a memory cardincluding a non-volatile memory device configured in accordance with theinventive concept.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Embodiments of the present inventive concept will now be described morefully hereinafter with reference to the accompanying drawings, in whichpreferred embodiments of the invention are shown. This invention may,however, be embodied in different forms and should not be construed aslimited to the embodiments set forth herein. Like numbers refer to likeelements throughout the specification.

It will be understood that, although the terms “first”, “second”, etc.are used herein to describe various elements, these elements should notbe limited by these terms. These terms are used to distinguish oneelement from another. For example, a “first” element could be termed a“second” element, and, similarly, a “second” element could be termed a“first” element, without departing from the scope of the presentinventive concepts. As used herein, the term “and/or” includes any andall combinations of one or more of the associated listed items.

It will be understood that when an element is referred to as being “on”or “connected” or “coupled” to another element, it can be directly on orconnected or coupled to the other element or intervening elements can bepresent. In contrast, when an element is referred to as being “directlyon” or “directly connected” or “directly coupled” to another element,there are no intervening elements present. Other words used to describethe relationship between elements should be interpreted in a likefashion (e.g., “between” versus “directly between,” “adjacent” versus“directly adjacent,” etc.). When an element is referred to herein asbeing “over” another element, it can be over or under the other element,and either directly coupled to the other element, or interveningelements may be present, or the elements may be spaced apart by a voidor gap.

The terminology used herein is for the purpose of describing particularembodiments and is not intended to be limiting of the invention. As usedherein, the singular forms “a,” “an” and “the” are intended to includethe plural forms as well, unless the context clearly indicatesotherwise. It will be further understood that the terms “comprises,”“comprising,” “includes” and/or “including,” when used herein, specifythe presence of stated features, integers, steps, operations, elements,and/or components, but do not preclude the presence or addition of oneor more other features, integers, steps, operations, elements,components, and/or groups thereof.

In the specification, it will be understood that when a layer (or film)is referred to as being ‘on’ another layer or substrate, it can bedirectly on the other layer or substrate, or intervening layers may alsobe present. In the drawings, the dimensions of layers and regions areexaggerated for clarity of illustration. Also, though terms like afirst, a second, and a third are used to describe various regions andlayers in various embodiments of the present invention, the regions andthe layers are not limited to these terms. These terms are used only todiscriminate one region or layer from another region or layer.Therefore, a layer referred to as a first layer in one embodiment can bereferred to as a second layer in another embodiment. An embodimentdescribed and exemplified herein includes a complementary embodimentthereof. As used herein, the term ‘and/or’ includes any and allcombinations of one or more of the associated listed items. Likereference numerals refer to like elements throughout.

First Embodiment

FIG. 1 is a cross-sectional view illustrating a non-volatile memorydevice according to an embodiment of the inventive concept.

Referring to FIG. 1, a semiconductor substrate 100 (hereinafter,referred to as a substrate) may include a cell region 50 and aperipheral region 60. The cell region 50 may correspond to a regionwhere an array of non-volatile memory cells suitable for storing logicdata are positioned. The peripheral region 60 may correspond to a regionwhere individual elements, for example, a peripheral field effecttransistor, and the like, constituting a peripheral circuit arepositioned. The substrate 100 may comprise a silicon substrate, agermanium substrate or a silicon-germanium substrate, or other substratesuitable for transistor devices. However, the inventive concept is notlimited thereto. In another example, the substrate 100 may be a compoundsemiconductor substrate.

A device isolation pattern (not illustrated), which defines activeportions ACT1 and ACT2, may be disposed on the substrate 100. In oneembodiment, the device isolation patterns may define a first activeportion ACT1 in the cell region 50 and a second active portion ACT2 inthe peripheral region 60. The first active portion ACT1 may correspondto a portion of the substrate 100 in the cell region 50 surrounded bythe device isolation pattern. The second active portion ACT2 maycorrespond to a portion of the substrate 100 in the peripheral region 60surrounded by the device isolation pattern. The first active portionACT1 may be doped with a first conductive-type dopant. The second activeportion ACT2 may be doped with the same conductive-type dopant as thatof the first active portion ACT1. Alternatively, the second activeportion ACT2 may be doped with a second conductive-type dopant that isdifferent from that of the first conductive type dopant of the firstactive portion ACT1.

A cell gate pattern CG may be positioned on the first active portionACT1. In some embodiments, the cell gate pattern CG may be included in anon-volatile memory cell. The cell gate pattern CG may include a controlgate electrode 137 that extends across the first active portion ACT1.The control gate electrode 137 may include a control base gate 120 a anda control metal pattern 125 an that are stacked sequentially on oneanother. The cell gate pattern CG may further include a first gate maskpattern 130 disposed on the control gate electrode 137. In addition, thecell gate patterns CG may further include a tunnel dielectric layer 105,a charge storage layer 110 a and a blocking dielectric layer 115 a whichare sequentially stacked between the first active portion ACT1 and thecontrol gate electrode 137.

The first gate mask pattern 130 may have a first width W1, the controlmetal pattern 125 an may have a second width W2, and the control basegate 120 a may have a third width W3. In the present embodiment, thesecond width W2 of the control metal pattern 125 an may be less than thefirst width W1 of the first gate mask pattern 130 and may be less thanthe third width W3 of the control base gate 120 a. As a result, a pairof first undercut regions UC1 may be defined at both sides of thecontrol metal pattern 125 an. The pair of first undercut regions UC1 maybe defined under both edge regions of the first gate mask pattern 130.

A pair of first oxidation-resistant spacers 135 a may be disposed onboth sidewalls of the control metal pattern 125 an, respectively. Thepair of first oxidation-resistant spacers 135 a may be disposed betweenboth edge regions of the first gate mask pattern 130 and between bothedge regions of the control base gate 120 a. In other words, a bottomend of the first oxidation-resistant spacer 135 a may be positioned atthe same level as, or at a level higher than a level of an upper surfaceof the control base gate 120 a, and a top end of the firstoxidation-resistant spacer 135 a may be positioned at the same level asor at a level lower level than a level of a lower surface of the firstgate mask pattern 130. The pair of first oxidation-resistant spacers 135a may be directly in contact with both sidewalls of the control metalpattern 125 an. According to an embodiment, the pair of firstoxidation-resistant spacers 135 a may be positioned in the pair of firstundercut regions UC1, respectively. In some embodiments, the pair offirst oxidation-resistant spacers 135 a are limited to the firstundercut regions UC1.

The control metal pattern 125 an may comprise a metal having lowresistivity. For example, the control metal pattern 125 an may comprisetungsten, copper, or another suitable metal, or combinations thereof.The first oxidation-resistant spacer 135 a may comprise a materialhaving superior oxidation resistance. For example, the firstoxidation-resistant spacer 135 a may comprise a nitride. According to anembodiment, the first oxidation-resistant spacer 135 a may comprise aninsulating nitride. For example, the first oxidation-resistant spacer135 a may comprise a silicon nitride and/or silicon oxynitride, etc.According to another embodiment, the first oxidation-resistant spacer135 a may comprise a conductive nitride. For example, the firstoxidation-resistant spacer 135 a may also comprise a conductive metalnitride (e.g., a titanium nitride (TiN), a tantalum nitride (TaN) and/ortungsten nitride (WN), etc.).

The control base gate 120 a may comprise a conductive material having anetch selectivity with respect to the control metal pattern 125 an. Forexample, the control base gate 120 a may include a semiconductor dopedwith a dopant (e.g., silicon doped with a dopant, silicon-germaniumdoped a dopant, etc.). According to an embodiment, in the case where thecontrol base gate 120 a includes the semiconductor doped with thedopant, the control base gate 120 a may further include carbon. That is,the control base gate 120 a may comprise a semiconductor doped with thedopant and carbon. The dopant may be a first-conductive-type dopant or asecond-conductive-type dopant. One of the first conductive type dopantand second conductive type dopant may be an n-type dopant, and the otherone may be a p-type dopant. However, the inventive concept is notlimited thereto. The control base gate 120 a may include anotherconductive material having an etch selectivity with respect to thecontrol metal pattern 125 an. According to an embodiment, the controlbase gate 120 a may include a conductive nitride (e.g., TiN, TaN, etc.)and/or a transition metal (e.g., titanium (Ti), tantalum (Ta), etc.).Alternatively, the control base gate 120 a may include the semiconductordoped with the dopant (or the semiconductor doped with the dopant andcarbon) and the conductive metal nitride. Alternatively, the controlbase gate 120 a may also include the semiconductor doped with the dopant(or the semiconductor doped with the dopant and carbon), the transitionmetal and the conductive metal nitride.

The first gate mask pattern 130 may include a dielectric material havingan etch selectivity with respect to the control metal pattern 125 an.Further, the first gate mask pattern 130 may include a dielectricmaterial having an etch selectivity with respect to the firstoxidation-resistant spacer 135 a. For example, the first gate maskpattern 130 may include oxide (e.g., a silicon oxide, etc.). However,the inventive concept is not limited thereto. In a case where the firstoxidation-resistant spacer 135 a includes the conductive nitride, thefirst gate mask pattern 130 may include a silicon oxide, a siliconnitride and/or a silicon oxynitride, and other suitable materials.

The charge storage layer 110 a may include a semiconductor material. Forexample, the charge storage layer 110 a may include polycrystallinesilicon, etc. In this case, the charge storage layer 110 a may be afloating gate. Charge used for storing data may be stored as free chargein the charge storage layer 110 a. The charge storage layer 110 a mayinclude sidewalls that are substantially self-aligned with sidewalls ofthe control base gate 120 a. The charge storage layer 110 a may be in anundoped state. Alternatively, the charge storage layer 110 a may be in astate doped with a dopant. According to an embodiment, the chargestorage layer 110 a may be doped with the second conductive type dopantthat is a different type dopant from that of the first active portionACT1 present under the charge storage layer 110 a. Among the firstconductive type dopant and the second conductive type dopant, one may bean n-type dopant and the other one may be a p-type dopant.

Alternatively, the charge storage layer 110 a may be doped with thefirst conductive type dopant that is the same conductive type dopant asthat of the first active portion ACT1. When the charge storage layer 110a and the first active portion ACT1 are doped with the same type dopant,charge stored in the charge storage layer 110 a may have an oppositetype to major carriers present in the charge storage layer 110 a. Inthis case, an energy barrier between charge stored in the charge storagelayer 110 a and the tunnel dielectric layer 105 can be increased suchthat data retention characteristics of a non-volatile memory cell may beincreased.

According to an embodiment, the charge storage layer 110 a may be dopedwith carbon. For example, the charge storage layer 110 a may includesilicon doped with carbon. In some embodiments, the charge storage layer110 may alternatively be doped with carbon and the dopant. For example,the charge storage layer 110 a may include silicon doped with carbon andthe dopant (e.g., the first conductive type dopant or the secondconductive type dopant).

The tunnel dielectric layer 105 may include oxide (e.g., a siliconoxide, etc.) and/or oxynitride (e.g., a silicon oxynitride, etc.). Forexample, the tunnel dielectric layer 105 may include an oxide formed byperforming an oxidation process on the first active portion ACT1 and/oran oxynitride formed by performing an oxynitriding process on the firstactive portion ACT1, etc. The oxynitriding process may include aoxidation process and nitridation process.

The blocking dielectric layer 115 a may include oxide/nitride/oxide(ONO). Alternatively, the blocking dielectric layer 115 a may include ahigh-k dielectric material (e.g., an insulating metal oxide such as analuminum oxide, a hafnium oxide, etc., or the like) having a higherdielectric constant than that of the tunnel dielectric layer 105. Inaddition, the blocking dielectric layer 115 a may include the high-kdielectric material and a barrier dielectric material. The barrierdielectric material may include a dielectric material (e.g., a siliconoxide, etc.) having a larger bandgap energy than that of the high-kdielectric material.

According to an embodiment, an oxide layer 140 may be disposed on bothsidewalls of the control base gate 120 a and both sidewalls of thecharge storage layer 110 a. For example, the oxide layer 140 may includean oxide which is formed by oxidation of the both sidewalls of thecontrol base gate 120 a and the both sidewalls of the charge storagelayer 110 a.

A cell source/drain 145 may be defined in the first active portion ACT1adjacent to both sides of the cell gate pattern CG. According to anembodiment, the cell source/drain 145 may be doped with a different typedopant from that of the first active portion ACT1 (i.e., the secondconductive type dopant).

A first gate spacer 150 a may be disposed on both sidewalls of the cellgate pattern CG. According to an embodiment, a plurality of the cellgate patterns CG may be disposed on the first active portion ACT1. Thecell gate patterns CG may be spaced apart in a lateral directionrelative to each other. As shown in FIG. 1, according to an embodiment,at least a portion of a space between the adjacent cell gate patterns CGmay be filled with the first gate spacers 150 a. For example, at least aportion of the spacer below a lower surface of the first gate maskpattern 130 may be filled with the first gate spacers 150 a. However,the inventive concept is not limited thereto.

The first gate spacer 150 a may include oxide (e.g., a silicon oxide,etc.). In some embodiments, the first gate spacer 150 a does not includesilicon nitride.

Continuing to refer to FIG. 1, a peripheral gate pattern PG may bedisposed on the second active portion ACT2 of the peripheral region 60.The peripheral gate pattern PG may include a peripheral gate dielectriclayer 106, a peripheral gate electrode 138 and a second gate maskpattern 131 which are sequentially stacked. The peripheral gateelectrode 138 may include a peripheral bottom gate 111 a, a peripheralsub-gate 120 b and a peripheral metal pattern 125 bn which aresequentially stacked.

A width of the peripheral metal pattern 125 bn may be smaller thanwidths of the second gate mask pattern 131 and the peripheral sub-gate120 b. Therefore, a pair of second undercut regions UC2 may be definedat both sides of the peripheral metal pattern 125 bn, respectively. Thepair of second undercut regions UC2 may be defined under both edgeregions of the second gate mask pattern 131, respectively.

A pair of second oxidation-resistant spacers 135 b may be disposed onboth sidewalls of the peripheral metal pattern 125 bn. At this time, thepair of second oxidation-resistant spacers 135 b may be disposed betweenboth edge regions of the second gate mask patter 131 and both edgeregions of the peripheral sub-gate 120 b. A bottom end of the secondoxidation-resistant spacer 135 b may be positioned at the same level asor a higher level than a level of an upper surface of the peripheralsub-gate 120 b. A top end of the second oxidation-resistant spacer 135 bmay be positioned at the same level as or a lower level than a level ofa lower surface of the second gate mask pattern 131. The pair of secondoxidation-resistant spacers 135 b may be positioned to be in directcontact with both sidewalls of the peripheral metal pattern 125 bn.According to an embodiment, the pair of second oxidation-resistantspacers 135 b may be positioned in the pair of second undercut regionsUC2, respectively. The second oxidation-resistant spacer 135 b mayinclude a material having superior oxidation resistance characteristics.For example, the second oxidation-resistant spacer 135 b may be formedof the same material as the first oxidation-resistant spacer 135 a.

The second gate mask pattern 131 may include a dielectric materialhaving an etch selectivity with respect to the peripheral metal pattern125 bn. The peripheral sub-gate 120 b may include a conductive materialhaving an etch selectivity with respect to the peripheral metal pattern125 bn. The peripheral metal pattern 125 bn may be formed of the samematerial as that of the control metal pattern 125 an. The second gatemask pattern 131 may be formed of the same dielectric material as thatof the first gate mask pattern 130. The peripheral sub-gate 120 b may beformed of the same conductive material as that of the control base gate120 a.

The peripheral bottom gate 111 a may comprise the same semiconductormaterial as that of the charge storage layer 110 a. At this time, theperipheral bottom gate 111 a may have electrical conductivitycharacteristics by doping the material of the gate with a dopant. Theperipheral sub-gate 120 b may be electrically connected to theperipheral bottom gate 111 a. An interlayer dielectric pattern 115 b maybe disposed between the peripheral sub-gate 120 b and the peripheralbottom gate 111 a. At this time, the peripheral sub-gate 120 b may beextended to fill an opening 117 penetrating the interlayer dielectricpattern 115 b. Therefore, the peripheral sub-gate 120 b may bepositioned to be in direct contact with the peripheral bottom gate 111a. The interlayer dielectric pattern 115 b may be formed of the samematerial as the blocking dielectric layer 115 a.

The density of patterns including the peripheral gate pattern PG in theperipheral region 60 may be different from the density of patternsincluding the cell gate patterns CG of the cell region 50. Therefore, adegree of inclination of a sidewall of the peripheral gate pattern PGmay be different from that of a sidewall of the cell gate pattern CG,for example due to various loading effects. More specifically, the angleof inclination of the sidewall of the peripheral gate pattern PGrelative to an upper surface of the substrate 100 may be different fromthat of the sidewall of the cell gate pattern CG relative to the uppersurface of the substrate 100. As a result, a first thickness T1 of thefirst oxidation-resistant spacer 135 a positioned on the sidewall of thecontrol metal pattern 125 an may be different from a second thickness T2of the second oxidation-resistant spacer 135 b positioned on thesidewall of the peripheral metal pattern 125 bn. The firstoxidation-resistant spacer 135 a may have a first inner sidewalladjacent to the sidewall of the control metal pattern 125 an and a firstouter sidewall opposite to the first inner sidewall. The first thicknessT1 of the first oxidation-resistant spacer 135 a may correspond to theshortest distance between the first inner sidewall and the first outersidewall of the first oxidation-resistant spacer 135 a. Likewise, thesecond oxidation-resistant spacer 135 b may have a second inner sidewalladjacent to the sidewall of the peripheral metal pattern 125 bn and asecond outer sidewall opposite to the second inner sidewall. The secondthickness T2 of the second oxidation-resistant spacer 135 b maycorrespond to the shortest distance between the second inner sidewalland the second outer sidewall of the second oxidation-resistant spacer135 b.

According to an embodiment, the inclination of the sidewall of theperipheral gate pattern PG may be gentler than that of the sidewall ofthe cell gate pattern CG. That is, the incline angle of the sidewall ofthe peripheral gate pattern PG relative to the upper surface of thesubstrate 100 may be less than that of the side wall of the cell gatepattern CG relative to the upper surface of the substrate 100. In thiscase, the second thickness T2 of the second oxidation-resistant spacer135 b may be larger than the first thickness T1 of the firstoxidation-resistant spacer 135 a.

According to an embodiment, the first outer sidewall of the firstoxidation-resistant spacer 135 a may be laterally recessed relative to asidewall of the first gate mask pattern 130. Accordingly, the secondwidth W2 of the control metal pattern 125 an may be less than the thirdwidth W3 of the control base gate 120 a, or may be less than the firstwidth W1 of the first gate mask pattern 130. Also, the sum of the secondwidth W2 of the control metal pattern 125 an and the first thicknessesT1 of the pair of first oxidation-resistant spacers 135 a may be lessthan the third width W3 of the control base gate 120 a, or may be lessthan the first width W1 of the first gate mask pattern 130.

In some embodiments, including any of the embodiments disclosed herein,the first thickness T1 of one of the pair of first oxidation-resistantspacers 135 a may be less than one-half a width W2 of a narrowestportion of the control metal pattern 125 an. Also, the height of theoxidation-resistant spacers may be substantially equal to a height ofthe control metal pattern 125 an.

According to an embodiment, the oxide layer 140 may also be disposed onboth sidewalls of the peripheral sub-gate 120 b and the peripheralbottom gate 111 a. A peripheral source/drain 148 may be disposed in thesecond active portion ACT2 adjacent to both sides of the peripheral gatepattern PG. The peripheral source/drain 148 may be doped with adifferent type dopant from a dopant in the second active portion ACT2.Second gate spacers 150 b may be disposed on the both sidewalls of theperipheral gate pattern PG, respectively. The peripheral source/drain148 may have a lightly doped drain (LDD) structure including a lowconcentration region 146 and a high concentration region 147. The secondgate spacer 150 b may be formed of the same material as the first gatespacer 150 a. An interlayer dielectric layer 155 may be disposed on anentire surface of the substrate 100 including the gate spacers 150 a and150 b and the gate patterns CG and PG. The interlayer dielectric layer155 may include oxide.

According to the foregoing non-volatile memory device, the pair of firstoxidation-resistant spacers 135 a may be disposed on the both sidewallsof the control metal pattern 125 an. Therefore, the control metalpattern 125 an may be prevented from being oxidized during a subsequentoxidation process or otherwise by exposure to oxygen, for example,during the process for forming the oxide layer 140. Also, the firstoxidation-resistant spacers 135 a may be positioned to be confined tothe region defined between both edge regions of the first gate maskpattern 130 and both edge regions of the control base gate 120 a. Thisenables minimization of an increase in the line width of the cell gatepattern CG that would otherwise be caused by the presence of the firstoxidation-resistant spacers 135 a. As a result, a non-volatile memorydevice having excellent reliability and optimized for high integrationdensity can be achieved.

In addition, a resistance of the control gate electrode 137 may beminimized by the material of the control metal pattern 125 an having lowresistivity characteristics. Therefore, a non-volatile memory deviceoperating at a high speed can be achieved.

Likewise, the peripheral metal pattern 125 bn may be prevented frombeing oxidized due to the presence of the second oxidation-resistantspacers 135 b on both sidewalls of the peripheral metal pattern 125 bn.Also, the second oxidation-resistant spacers 135 b may be positioned tobe confined between both edge regions of the second gate mask pattern131 and both edge regions of the peripheral sub-gate 120 b. This enablesminimization of an increase in the line width of the peripheral gatepattern PG that would otherwise be caused by the presence of the firstoxidation-resistant spacers 135 a. As a result, a peripheral transistorin the peripheral region 60 can have excellent reliability and can beoptimized for high integration density. In addition, the peripheral gateelectrode 138 also includes the peripheral metal pattern 125 bn havinglow resistivity characteristics, such that the peripheral transistor canoperate at a high speed.

Furthermore, according to an embodiment, the second thickness T2 of thesecond oxidation-resistant spacer 135 b may be greater than the firstthickness T1 of the first oxidation-resistant spacer 135 a. Thus, thecell gate patterns CG having relatively narrow linewidths and/or spacescan prevent the control metal pattern 125 an from being oxidized andalso maintain narrow linewidth and/or space due to the firstoxidation-resistant spacer 135 a having a relatively thin thickness.Also, the peripheral gate patterns PG having a relatively greater widthscan efficiently prevent the peripheral metal pattern 125 bn frombecoming oxidized as a result of the second oxidation-resistant spacer135 b having a relatively greater thickness. As a result, it is possibleto realize a nonvolatile memory device which has excellent reliabilityand which is optimized for high integration.

Next, various modified examples of non-volatile memory devices accordingto the inventive concept will be described with reference to thefollowing drawings.

Referring to the embodiment of FIG. 1, in this example, the sum of thewidth W2 of the control metal pattern 125 an and the thicknesses T1 ofthe pair of first oxidation-resistant spacers 135 a may be smaller thanthe width W3 of the control base gate 120 a. However, embodiments of theinventive concept are not limited thereto. As shown in the exampleembodiment of FIG. 2, the sum of the width of the control metal pattern125 an and the thicknesses of the pair of first oxidation-resistantspacers 135 a′ disposed on the both sidewalls of the control metalpattern 125 an may be substantially equal to the width of the controlbase gate 120 a. In this case, the outer sidewall of the firstoxidation-resistant spacer 135 a′ may be substantially self-aligned withthe sidewall of the first gate mask pattern 130. In this exampleembodiment, the first oxidation-resistant spacer 135 a′ of FIG. 2 may beformed of the same material as that of the first oxidation-resistantspacer 135 a of FIG. 1.

FIG. 3 is a cross-sectional view illustrating another modified exampleof a non-volatile memory device according to an embodiment of theinventive concept.

According to the present modified example, as shown in FIG. 3, asidewall of a control base gate 120 a′ included in a control gateelectrode 137′ may have a stepped shape. Specifically, a width of anupper portion of the control base gate 120 a′ may be smaller than thatof a lower portion of the control base gate 120 a′. Therefore, thesidewall of the control base gate 120 a′ may have the stepped shape. Inthis case, the width of the upper portion of the control base gate 120a′ may be substantially equal to the first width W1 of the first gatemask pattern 130, and the width of the lower portion of the control basegate 120 a′ may be greater than the first width W1 of the first gatemask pattern 130. Both of the sidewalls of the underlying charge storagelayer 110 a′ may be self-aligned with both of the sidewalls of the lowerportion of the control base gate 120 a′. According to an embodiment,when the sidewall of the control base gate 120 a′ has the stepped shape,the outer sidewall of the first oxidation-resistant spacer 135 a′ may besubstantially self-aligned to the sidewall of the first gate maskpattern 130. Also, in this embodiment, the first oxidation resistantspacer 135 a′ may cover a portion of a top surface and a portion of asidewall surface of the upper portion of the control base gate 135′.

Similarly, in the embodiment of FIG. 3, a sidewall of a peripheralsub-gate 120 b′ included in a peripheral gate electrode 138′ may alsohave a stepped shape. That is, a width of an upper portion of theperipheral sub-gate 120 b′ may be smaller than that of a lower portion.In this case, both of the sidewalls of a peripheral bottom gate 111 a′may be substantially self-aligned to both of the sidewalls of the lowerportion of the peripheral sub-gate 120 b′.

FIG. 4 is a cross-sectional view illustrating still another modifiedexample of a non-volatile memory device according to an embodiment ofthe inventive concept.

According to the present modified example, as shown in FIG. 4, thesidewalls of the control base gate 120 a in the control gate electrode137 are flat, whereas the sidewalls of the peripheral sub-gate 120 b′ inthe peripheral gate electrode 138′ may have a stepped shape. In thiscase, the outer sidewall of the first oxidation-resistant spacer 135 amay be positioned to be recessed laterally relative to the sidewall ofthe first gate mask pattern 130. However, the inventive concept is notlimited thereto. For example, in the example embodiment of FIG. 4, theouter sidewall of the first oxidation-resistant spacer 135 a canalternatively be substantially self-aligned to the sidewall of the firstgate mask pattern 130, for example, in accordance with the embodiment ofFIG. 2.

FIG. 5 is a cross-sectional view illustrating yet another modifiedexample of a non-volatile memory device according to an embodiment ofthe inventive concept.

Referring to FIG. 5, according to the present modified example, acontrol gate electrode 137 a may further include a first lower barrierpattern 170 a positioned between the control base gate 120 a and thecontrol metal pattern 125 an. In this case, the control base gate 120 amay be formed of a semiconductor material that is doped with a dopant(e.g., silicon doped with a dopant, silicon-germanium doped with adopant, etc.) and/or a semiconductor material that is doped with adopant and carbon (e.g., silicon doped with a dopant and carbon,silicon-germanium doped with a dopant and carbon, etc.). The first lowerbarrier pattern 170 a may be formed of a conductive material havingproperties so as to minimize diffusion of metal atoms from the controlmetal pattern 125 an into the control base gate 120 a. For example, thefirst lower barrier pattern 170 a may comprise a conductive metalnitride (e.g., a titanium nitride, a tantalum nitride and/or a tungstennitride, etc.). In addition, the first lower barrier pattern 170 a mayalso further comprise a transition metal (e.g., titanium or tantalum,etc.) disposed between the conductive metal nitride and the control basegate 120 a.

A width in the horizontal direction of the top surface of the substrate100 of the first lower barrier pattern 170 a may be greater than that ofthe control metal pattern 125 an. In this case, the pair of firstoxidation-resistant spacers 135 a may be disposed between the both edgeregions of the first gate mask pattern 130 and both edge regions of thefirst lower barrier pattern 170 a. Both of the sidewalls of the firstlower barrier pattern 170 a may be substantially self-aligned to both ofthe sidewalls of the first gate mask pattern 130.

According to an embodiment, the control gate electrode 137 a may furtherinclude a first upper barrier pattern 175 a disposed between the controlmetal pattern 125 an and the first gate mask pattern 130. The firstupper barrier pattern 175 a may be formed of a conductive materialhaving properties so as to minimize diffusion of metal atoms from thecontrol metal pattern 125 an into the first gate mask pattern 130. Forexample, the first upper barrier pattern 175 a may comprise a conductivemetal nitride (e.g., a titanium nitride, a tantalum nitride and/or atungsten nitride, etc.). In addition, the first upper barrier pattern175 a may also further comprise a transition metal (e.g., titaniumand/or tantalum, etc.) disposed between the conductive metal nitride andthe control metal pattern 125 an. A width of the first upper barrierpattern 175 a may be greater than that of the control metal pattern 125an. The pair of first oxidation-resistant spacers 135 a may be disposedbetween both of the edge regions of the first upper barrier pattern 175a and both of the edge regions of the first lower barrier pattern 170 a.Further, both of the sidewalls of the first upper barrier pattern 175 amay be substantially self-aligned to both of the sidewalls of the firstgate mask pattern 130. According to an embodiment, any one of the firstlower barrier pattern 170 a and the first upper barrier pattern 175 amay be omitted.

In similar fashion to the cell gate pattern CG, a peripheral gateelectrode 138 a in the peripheral region 60 may further include a secondlower barrier pattern 170 b disposed between the peripheral sub-gate 120b and the peripheral metal pattern 125 bn. A width of the second lowerbarrier pattern 170 b may be greater than that of the peripheral metalpattern 125 bn. In this case, the pair of second oxidation-resistantspacers 135 b may be disposed between both of the edge regions of thesecond lower barrier pattern 170 b and both of the edge regions of thesecond gate mask pattern 131. Both of the sidewalls of the second lowerbarrier pattern 170 b may be substantially self-aligned to both of thesidewalls of the second gate mask pattern 131. The peripheral gateelectrode 138 a may further include a second upper barrier pattern 175 bdisposed between the peripheral metal pattern 125 bn and the second gatemask pattern 131. A width of the second upper barrier pattern 175 b maybe greater than that of the peripheral metal pattern 125 bn. In thiscase, the pair of second oxidation-resistant spacers 135 b may bedisposed between both edge regions of the second upper barrier pattern175 b and both edge regions of the second lower barrier pattern 170 b.The second lower barrier pattern 170 b may be formed of the sameconductive material as that of the first lower barrier pattern 170 a,and the second upper barrier pattern 175 b may be formed of the sameconductive material as that of the first upper barrier pattern 175 a.According to an embodiment, any one of the second lower barrier pattern170 b and the second upper barrier pattern 175 b may be omitted.

In various embodiments of the present inventive concepts, the first andsecond lower barrier patterns 170 a and 170 b and/or the first andsecond upper barrier patterns 175 a and 175 b may be applied to any oneof the non-volatile memory device embodiments described herein,including the embodiments of FIGS. 1 through 4.

In some embodiments, including any of the embodiments disclosed herein,the thickness of the lower barrier layer 170 a may be less than one-halfa thickness of the control metal pattern 125 an. Similarly, thethickness of the upper barrier layer 175 a may be less than one-half athickness of the control metal pattern 125 an.

According to an embodiment, air gaps 157 may be disposed in theinterlayer dielectric layer 155 or in the gate spacer layer 150 a atpositions that are between neighboring ones of the cell gate patternsCG. As an interval between the adjacent cell gate patterns CG becomesnarrow, the air gap 157 may be formed. The first gate spacers 150 a maycover the air gap 157. The air gap 157 has a lower dielectric constantthan oxide. As a result, parasitic electrostatic capacitancecharacteristics between the adjacent cell gate patterns CG can beminimized, so that a non-volatile memory device having excellentreliability can be achieved. In other embodiments, the air gap 157 mayalso be formed between the adjacent cell gate patterns CG included inthe non-volatile memory devices of FIGS. 1 through 4.

Next, a method of fabricating a non-volatile memory device according toan embodiment of the inventive concept will be described with referenceto the following drawings.

FIGS. 6A through 6G are cross-sectional views illustrating a method offabricating a non-volatile memory device according to an embodiment ofthe inventive concept, and FIG. 7 is a flow chart illustrating a methodof forming an oxidation-resistant spacer and gate patterns of anon-volatile memory device according to an embodiment of the inventiveconcept.

Referring to FIG. 6A, a substrate 100 including a cell region 50 and aperipheral region 60 may be prepared. A first active portion ACT1 in thecell region 50 and a second active portion ACT2 in the peripheral region60 may be defined. A tunnel dielectric layer 105 and a firstsemiconductor pattern 110 may be sequentially formed on the first activeportion ACT1. A peripheral gate dielectric layer 106 and a secondsemiconductor pattern 111 may be sequentially formed on the secondactive portion ACT2. The first and second active portions ACT1 and ACT2may be defined by a device isolation pattern (not illustrated) formed onthe substrate 100. The first semiconductor pattern 110 may be formed atthe first active portion ACT1 in a self-aligned manner, and the secondsemiconductor pattern 111 may be formed at the second active portionACT2 in a self-aligned manner.

For example, the tunnel dielectric layer 105 may be formed on thesubstrate 100 of the cell region 50. The peripheral gate dielectriclayer 106 may be formed on the substrate 100 of the peripheral region60. The tunnel dielectric layer 105 and the peripheral gate dielectriclayer 106 may be formed at the same time. Alternatively, the tunneldielectric layer 105 and the peripheral gate dielectric layer 106 may besequentially formed. A semiconductor layer and a hard mask layer may besequentially formed on an entire surface of the substrate 100 having thedielectric layers 105 and 106. By continuously patterning the hard masklayer, the semiconductor layer, the dielectric layers 105 and 106 andthe substrate 100, a trench (not illustrated), which defines therelative positions of the first and second active portions ACT1 andACT2, may be formed. At this time, the first semiconductor pattern 110and the first hard mask pattern (not illustrated) may be sequentiallyformed on the tunnel dielectric layer 105 on the first active portionACT1, and the second semiconductor pattern 111 and the second hard maskpattern (not illustrated) may be sequentially formed on the peripheralgate dielectric layer 106 on the second active portion ACT2. Therefore,the first and second semiconductor patterns 110 and 111 may be formed tothe first and second active regions ACT1 and ACT2 in a self-alignedmanner, respectively. Subsequently, a device isolation pattern (notillustrated) that fills the trench may be formed. Subsequently, thefirst and second hard mask patterns may be removed.

The second semiconductor pattern 111 may be made to be electricallyconductive by being doped with a dopant. The first semiconductor pattern110 may be in an undoped state or a state doped with a dopant and/orcarbon. When the first and second semiconductor patterns 110 and 111 aredoped with the same type dopant, the semiconductor layer may be doped byan in-situ method. Alternatively, when the first semiconductor pattern110 is in an undoped state or is doped with a different type dopant fromthe second semiconductor pattern 111, a selective doping method may beperformed on the semiconductor layer.

However, embodiments of the inventive concepts are not limited thereto.The first and second semiconductor patterns 110 and 111 may be formed byother methods.

Referring to FIG. 6B, a blocking dielectric layer 115 may be formed onthe substrate 100 having the first and second semiconductor patterns 110and 111. An opening 117, which exposes the second semiconductor pattern111, may be formed by patterning the blocking dielectric layer 115 inthe peripheral region 60. Subsequently, a base conductive layer 120 anda metal layer 125 may be sequentially formed on the entire surface ofthe substrate 100. The base conductive layer 120 in the peripheralregion 60 may fill the opening 117 to be in contact with the secondsemiconductor pattern 111.

A gate mask layer is formed on the metal layer 125, and a first gatemask pattern 130 in the cell region 50 and a second gate mask pattern131 in the peripheral region 60 may be formed by patterning the gatemask layer. The gate mask layer may include a dielectric material havingan etch selectivity with respect to the metal layer 125, the baseconductive layer 120 and the semiconductor patterns 110 and 111. Forexample, the gate mask layer may be formed of an oxide layer.

Referring to FIG. 6C, a control metal pattern 125 a in the cell region50 and a peripheral metal pattern 125 b in the peripheral region 60 maybe formed by etching the metal layer 125 using the first and second gatemask patterns 130 and 131 as etching masks. The metal layer 125 may beetched by a first dry etching process having dominant anisotropycharacteristics. The base conductive layer 120 may be exposed at bothsides of the control and peripheral metal patterns 125 a and 125 b.

According to an embodiment, due to the difference in pattern densitybetween the cell region 50 and the peripheral region 60 or the like, theresulting degree of inclination of sidewalls of the control metalpattern 125 a and the first gate mask pattern 130 may be different fromthat of sidewalls of the peripheral metal pattern 125 b and the secondgate mask pattern 131. For example, the sidewalls of patterns 125 b and131 stacked in the peripheral region 60 may be inclined to a more gentledegree as compared to the degree of inclination of the sidewalls ofpatterns 125 a and 130 stacked in the cell region 50. That is, theinclination angle between the sidewalls of patterns 125 b and 131stacked in the peripheral region 60 and an upper surface of thesubstrate 100 may be less than that of the sidewalls of patterns 125 aand 130 stacked in the cell region 50 and the upper surface of thesubstrate 100.

Referring to FIG. 6D, both of the sidewalls of the control metal pattern125 a and both of the sidewalls of the peripheral metal pattern 125 bare etched in a lateral direction. As a result, a pair of first undercutregions UC1 may be formed at both sides of a control metal pattern 125an etched laterally. Also, a pair of second undercut regions UC2 may beformed at both sides of a peripheral metal pattern 125 bn etchedlaterally. The pair of first undercut regions UC1 may be formed underboth edge regions of the first gate mask pattern 130, respectively, andthe pair of second undercut regions UC2 may be formed under both edgeregions of the second gate mask pattern 131, respectively. In thismanner, the undercut regions UC1, UC2 are recessed in a lateraldirection, relative to outer edges the gate mask patterns 130, 131 thatlie above them.

According to an embodiment, the sidewalls of the control and peripheralmetal patterns 125 a and 125 b may be etched in a lateral directionusing a reactive dry etching process. The reactive dry etching processmay have a dominant isotropy. As a result, both sidewalls of the controland peripheral metal patterns 125 a and 125 b may be etched in a lateraldirection. For example, a back bias of the reactive dry etching processmay be reduced, or radical components in an etching gas of the reactivedry etching process may be increased. Alternatively, both sidewalls ofthe control and peripheral metal patterns 125 a and 125 b may be etchedby a wet etching process.

Referring to FIG. 6E, an oxidation-resistant layer 135 may be depositedon the substrate 100 having the undercut, or recessed, regions UC1 andUC2. In various embodiments, the oxidation-resistant layer 135 may bedeposited by a chemical vapor deposition process or an atomic layerdeposition process, or by another suitable process. Theoxidation-resistant layer 135 may partially or completely fill theundercut regions UC1 and UC2.

According to an embodiment, as described above, due to a difference indegree of inclination of the sidewalls, a deposition thickness of theoxidation-resistant layer 135 on the sidewalls of the patterns 125 anand 130 stacked in the cell region 50 may be different from thedeposition thickness of the oxidation-resistant layer 135 on thesidewalls of the patterns 125 bn and 131 stacked in the peripheralregion 60. For example, when the sidewalls of the patterns 125 bn and131 stacked in the peripheral region 60 have a more gentle angle ofinclination than those of the patterns 125 an and 130 stacked in thecell region 50, the deposition thickness of the oxidation-resistantlayer 135 on the sidewalls of the patterns 125 bn and 131 stacked in theperipheral region 60 may be greater than that of the oxidation-resistantlayer 135 on the sidewalls of the patterns 125 an and 130 stacked in thecell region 50. The oxidation-resistant layer 135 on upper surfaces ofthe gate mask patterns 130 and 131 and the base conductive layer 120 maybe thicker than that on the sidewalls of the patterns 125 an, 130, 125bn and 131.

Next, a method of forming oxidation-resistant layers and gate patternswill be described in detail with reference to the flow chart of FIG. 7.

Referring to FIGS. 6E, 6F and 7, in operation S300, the base conductivelayer 120 at both sides of the gate mask patterns 130 and 131 may beexposed by etching the oxidation-resistant layer 135. At this time, afirst oxidation-resistant spacer 135 a may be formed in the firstundercut region UC1, and a second oxidation-resistant spacer 135 b maybe formed in the second undercut region UC2. The oxidation-resistantlayer 135 may be etched by a second dry etching process having adominant anisotropy. The second dry etching process may include adominant anisotropic etching component and a weak isotropic etchingcomponent. The oxidation-resistant layer 135 on the gate mask patterns130 and 131 and the base conductive layer 120 is etched by the dominantanisotropic etching component of the second dry etching process suchthat the upper surfaces of the gate mask patterns 130 and 131 and thebase conductive layer 120 may be exposed. The oxidation-resistant layer135 on the sidewalls of the gate mask patterns 130 and 131 may be etchedby the weak isotropic etching component of the second dry etchingprocess.

According to an embodiment, immediately following the performing of thesecond dry etching process, some portions of the first and secondoxidation-resistant spacers 135 a and 135 b may be disposed outside theundercut regions UC1 and UC2. For example, some portions of the firstand second oxidation-resistant spacers 135 a and 135 b may be extendedto be disposed on at least a portion of the sidewalls of the gate maskpatterns 130 and 131.

According to another embodiment, immediately after the performing of thesecond dry etching process, at least one of the first and secondoxidation-resistant spacers 135 a and 135 b may be confinedly formed inthe undercut region UC1 and/or UC2. For example, when theoxidation-resistant layer 135 on the sidewalls of the patterns 125 bnand 131 stacked in the peripheral region 60 is thicker than that on thesidewalls of the patterns 125 an and 130 stacked in the cell region 50,the first oxidation-resistant spacer 135 a may be confinedly formed inthe first undercut region UC1, and a portion of the secondoxidation-resistant spacer 135 b may also be disposed beyond the secondundercut region UC2. Alternatively, immediately after the performing ofthe second dry etching process, all the first and secondoxidation-resistant spacers 135 a and 135 b may be confinedly formed inthe first and second undercut regions UC1 and UC2.

In operation S302, the exposed base conductive layer 120, the blockingdielectric layer 115 and the semiconductor patterns 110 and 111 may becontinuously etched using the gate mask patterns 130 and 131 as etchingmasks. Therefore, a charge storage layer 110 a, a patterned blockingdielectric layer 115 a and a control base gate 120 a, which aresequentially stacked on the first active region ACT1, may be formed.Also, a peripheral bottom gate 111 a, an interlayer dielectric pattern115 b and a peripheral sub-gate 120 b, which are sequentially stacked onthe second active region ACT2, may be formed. The interlayer dielectricpattern 115 b may include the opening 117. Therefore, the peripheralsub-gate 120 b may be electrically connected to the peripheral bottomgate 111 a.

The base conductive layer 120, the blocking dielectric layer 115 and thesemiconductor patterns 110 and 111 may be etched by a third dry etchingprocess. According to an embodiment, the third dry etching process mayinclude a first sub-etching process, a second sub-etching process and athird sub-etching process. The base conductive layer 120 may be etchedby the first sub-etching process, and the blocking dielectric layer 115may be etched by the second sub-etching process. The semiconductorpatterns 110 and 111 may be etched by the third sub-etching process.According to an embodiment, etching recipes of the first, second andthird sub-etching processes may be different from each other.

The third dry etching process may have a dominant anisotropic etchingcomponent and a weak isotropic etching component. In other words, eachof the first, second and third sub-etching processes may have a dominantanisotropic etching component and a weak isotropic etching component. Asdescribed above, some portions of the first and secondoxidation-resistant spacers 135 a and 135 b may extend beyond the firstand second undercut regions UC1 and UC2 immediately after the second dryetching process. In this case, after the performing of the third dryetching process, those residual portions of the first and secondoxidation-resistant spacers 135 a and 135 b that remain positionedbeyond the undercut regions UC1 and UC2 may be removed by the third dryetching. Therefore, the first and second oxidation-resistant spacers 135a and 135 b are thus confinedly formed, or otherwise positionedexclusively, in the first and second undercut regions UC1 and UC2 afterthe third dry etching process.

When at least one of the first and second oxidation-resistant spacers135 a and 135 b is confinedly formed in the undercut region UC1 and/orUC2 immediately after the performing of the second dry etching process,an outer sidewall of the confined oxidation-resistant spacer 135 aand/or 135 b may also be recessed laterally relative to the sidewall ofthe gate mask pattern 130 and/or 131 as a result of the weak isotropicetching component of the third dry etching process. According to anembodiment, after the performing of the third dry etching process, theouter sidewall of the first oxidation-resistant spacer 135 a may berecessed in a lateral direction relative to the sidewall of the firstgate mask pattern 130 due to the reduction in thickness in the portionsof the oxidation-resistant layer 135.

However, the inventive concept is not limited thereto. For example,according to an embodiment, portions of at least one of the first andsecond oxidation-resistant spacers 135 a and 135 b may remain disposedoutside the undercut region UC1 and/or UC2, even after the performing ofthe third dry etching process.

After the performing of the foregoing operation S302, a cleaning processmay be performed on the substrate 100 in operation S304. In a case whereportions of at least one of the first and second oxidation-resistantspacers 135 a and 135 b remain disposed outside the undercut region UC1and/or UC2 after the performing of the third dry etching process, suchportions may be removed by the cleaning process. As a result,immediately after the performing of the operation S300, the operation302 or the operation S304, the first and second oxidation-resistantspacers 135 a and 135 b are confinedly formed in the first and secondundercut regions UC1 and UC2, so that the first and secondoxidation-resistant spacers 135 a, 135 b are positioned exclusively inthose regions UC1, UC2.

Referring to FIGS. 6G and 7, after performing the cleaning process ofoperation S304, a gate oxidation process may be performed on thesubstrate 100 in operation S306. As a result, an oxide layer 140 may beformed on both sidewalls of the control base gate 120 a, the chargestorage layer 110 a, the peripheral sub-gate 120 b and the peripheralbottom gate 111 a. Etched sidewalls of the gates 120 a, 120 b and 111 aand the charge storage layer 110 a may be cured by the gate oxidationprocess. The gate oxidation process may be performed in an oxygen sourcegas atmosphere. For example, an oxygen source gas of the gate oxidationprocess may include oxygen (O₂), nitrogen monoxide (NO), water vapor(H₂O) and/or nitrous oxide (N₂O), etc. A process temperature of the gateoxidation process may be in the range of about 300° C. to about 900° C.

According to the foregoing method, during the performing of the gateoxidation process in operation S306, the control metal pattern 125 anand the peripheral metal pattern 125 bn are protected from oxidation bythe first and second oxidation-resistant spacers 135 a and 135 b.Therefore, a non-volatile memory device having excellent reliability canbe achieved by minimizing oxidation of the metal patterns 125 an and 125bn.

If the metal patterns 125 an and 125 bn were to be oxidized by the gateoxidation process, various problems such as an abnormal growth of theoxide or the like may occur, so that reliability of a non-volatilememory device would be adversely affected. However, according toembodiments of the inventive concept, the first and secondoxidation-resistant spacers 135 a and 135 b operate to protect the metalpatterns 125 an and 125 bn, during the subsequent gate oxidationprocess, thereby achieving a non-volatile memory device having excellentreliability.

Also, the first and second oxidation-resistant spacers 135 a and 135 bare confinedly formed in the first and second undercut, or recessed,regions UC1 and UC2. Therefore, the phenomena of increasing widths ofthe gate patterns or the like may be minimized. As a result, anon-volatile memory device optimized for high integration density can beachieved.

Continuously, referring to FIG. 6G, a cell source/drain 145 may beformed in the first active region ACT1 at both sides of the first gatemask pattern 130. A low concentration region 146 of a peripheralsource/drain may be formed in the second active region ACT2 at bothsides of the second gate mask pattern 131. The cell source/drain 145 andthe low concentration region 146 may be formed at the same time, orsequentially formed regardless of the order.

Subsequently, a gate spacer layer may be formed, and then an etch-backprocess may be performed to the gate spacer layer, so that the first andsecond gate spacers 150 a and 150 b of FIG. 1 may be formed.Subsequently, the high concentration region 147 of FIG. 1 may be formedby providing a dopant in the second active region ACT2 using theperipheral gate pattern PG and the second gate spacer 150 b as masks.Therefore, the peripheral source/drain 148 of FIG. 1 may be formed.Subsequently, the interlayer dielectric layer 155 may be formed on theentire surface of the substrate 100. Therefore, the non-volatile memorydevice of FIG. 1 can be achieved.

Meanwhile, methods of fabricating the non-volatile memory devices shownin FIGS. 2 through 4 are similar to the described one with reference toFIGS. 6A through 6G and 7. The non-volatile memory devices of FIGS. 2through 4 may be achieved by adjusting a thickness of theoxidation-resistant layer 135 of FIG. 6E.

For example, in FIG. 6E, when the thickness of an oxidation-resistantlayer 135 on the sidewalls of the patterns 125 an and 130 stacked in thecell region 50 may be substantially equal to the thickness of theoxidation-resistant layer 135 on the sidewalls of the patterns 125 bnand 131 stacked in the peripheral region 60, the non-volatile memorydevice shown in FIG. 2 may be achieved.

In FIG. 6E, the oxidation-resistant layers 135, which are on thesidewalls of the patterns 125 an and 130 stacked in the cell region 50and the patterns 125 bn and 131 stacked in the peripheral region 60, maybe sufficiently thick. In this case, when the operation S302 of FIG. 7may be performed, some portions of the first and secondoxidation-resistant spacers 135 a and 135 b disposed outside theundercut regions UC1 and UC2 may be used as etching masks. Therefore, asshown in FIG. 3, the sidewalls of the control base gate 120 a′ and theperipheral sub-gate 120 b′ may be formed in a stepped shape. In thiscase, the portions of the oxidation-resistant spacers 135 a and 135 bpositioned outside the undercut regions UC1 and UC2 may be removedimmediately after the operation S302 or the operation S304 of FIG. 7.Therefore, the oxidation-resistant spacers 135 a and 135 b may beconfinedly formed in the undercut regions UC1 and UC2.

In FIG. 6E, the thickness of the oxidation-resistant layer 135 on thesidewall of the first gate mask pattern 130 may be less than that of theoxidation-resistant layer 135 on the sidewall of the second gate maskpattern 131 due to a difference in degree of inclination of the firstand second gate mask patterns 130, 131. Also, the thickness of theoxidation-resistant layer 135 on the sidewall of the second gate maskpattern 131 may be sufficiently thick. In this case, as shown in FIG. 4,the sidewall of the control base gate 120 a may be flat, and thesidewall of the peripheral sub-gate 120 b′ may be formed in a steppedshape. In this case, a portion of the second oxidation-resistant spacer135 b positioned outside the second undercut region UC2 may be removedafter the operation S302 or the operation S304 of FIG. 7. Therefore, thesecond oxidation-resistant spacer 135 b may be confinedly formed in thesecond undercut region UC2.

Next, a method of fabricating the non-volatile memory device shown inFIG. 5 will be described with reference to the following drawings.

FIGS. 8A through 8D are cross-sectional views illustrating a method offabricating the non-volatile memory device shown in FIG. 5.

Referring to FIG. 8A, after the forming of the base conductive layer120, a lower barrier layer 170, a metal layer 125 and an upper barrierlayer 175 may be sequentially formed. The first gate mask pattern 130may be formed on the upper barrier layer 175 of the cell region 50, andthe second gate mask pattern 131 may be formed on the upper barrierlayer 175 of the peripheral region 60. According to an embodiment, anyone of the lower barrier layer 170 and the upper barrier layer 175 maybe omitted. In the description below, the case where both the lower andupper barrier layers 170 and 175 are formed will be described for thepurpose of simplifying the description.

Referring to FIG. 8B, the upper barrier layer 175, the metal layer 125and the lower barrier layer 170 may be etched by using the first andsecond gate mask patterns 130 and 131 as etching masks. Therefore, afirst lower barrier pattern 170 a, a control metal pattern 125 a and afirst upper barrier pattern 175 a, which are stacked under the firstgate mask pattern 130, may be formed. Also, a second lower barrierpattern 170 b, a peripheral metal pattern 125 b and a second upperbarrier pattern 175 b, which are stacked under the second gate maskpattern 131, may be formed.

Referring to FIG. 8C, the sidewalls of the control metal pattern 125 aand the peripheral metal pattern 125 b are etched in a lateraldirection, relative to the horizontal direction of extension of thesubstrate. Therefore, the first undercut regions UC1 are formed at theboth sides of the laterally etched control metal pattern 125 an, and thesecond undercut regions UC2 are formed at the both sides of thelaterally etched peripheral metal pattern 125 bn. The control andperipheral metal patterns 125 a and 125 b may be laterally etchedaccording to the method described herein with reference to FIG. 6D.

As described with reference to FIG. 5, the lower and upper barrierpatterns 170 a, 170 b, 175 a and 175 b may have an etch selectivity withrespect to the metal patterns 125 a and 125 b. Therefore, the firstundercut region UC1 may be formed between the first lower and upperbarrier patterns 170 a and 175 a, and the second undercut region UC2 maybe formed between the second lower and upper barrier patterns 170 b and175 b.

Subsequently, the forming processes of the oxidation-resistant layerdescribed with reference to FIGS. 6E, 6F, 7 and 6G, and the operationsS300, S302, S304 and S306 of FIG. 7 may be sequentially performed.Therefore, as shown in FIG. 8D, the first and second oxidation-resistantspacers 135 a and 135 b may be formed in the first and second undercutregions UC1 and UC2. Also, the charge storage layer 110 a, the patternedblocking dielectric layer 115 a and the control base gate 120 a, whichare sequentially stacked under the first lower barrier pattern 170 a,may be formed. The peripheral bottom gate 111 a, the interlayerdielectric pattern 115 b and the peripheral sub-gate 120 b, which aresequentially stacked under the second lower barrier pattern 170 b, maybe formed. The oxide layer 140 may be formed on the sidewalls of thegates 120 a, 120 b and 111 a and the charge storage layer 110 a. Thesubsequent process may be performed with the same method as describedwith reference to FIGS. 6G and 1.

Second Embodiment

FIG. 9 is a cross-sectional view illustrating a non-volatile memorydevice according to another embodiment of the inventive concept.

Referring to FIG. 9, a device isolation pattern (not illustrated) isformed at a substrate 100 including cell and peripheral regions 50 and60 such that a first active portion ACT1 in the cell region 50 and asecond active portion ACT2 in the peripheral region 60 may be defined. Acell gate pattern CG may be disposed on the first active portion ACT1,and a peripheral gate pattern PG may be disposed on the second activeportion ACT2.

The cell gate pattern CG may include a control gate electrode 237 thatextends across the first active portion ACT1. Also, the cell gatepattern CG may further include a first gate mask pattern 230 disposed onthe control gate electrode 237. In addition, the cell gate pattern CGmay include a tunnel dielectric layer 205, a charge storage layer 210and a blocking dielectric layer 215 that are stacked sequentially underthe control gate electrode 237. The peripheral gate pattern PG mayinclude a peripheral gate electrode 238 that extends across the secondactive portion ACT2. Also, the peripheral gate pattern CG may furtherinclude a second gate mask pattern 231 disposed on the peripheral gateelectrode 238, and a peripheral gate dielectric layer 217 disposedbetween the peripheral gate electrode 238 and the second active portionACT2.

The control gate electrode 237 may include a control base gate 220 a anda control metal pattern 225 an that are sequentially stacked. A width ofthe control gate pattern 225 an may be less than a width of the firstgate mask pattern 230 and less than a width of the control base gate 220a. As a result, a pair of first undercut regions UC1 may be defined atboth sides of the control metal pattern 225 an. A pair of firstoxidation-resistant spacers 235 a is disposed on both sidewalls of thecontrol metal pattern 225 an, respectively. The pair of firstoxidation-resistant spacers 235 a may be disposed between both edgeregions of the first gate mask pattern 230 and between both edge regionsof the control base gate 220 a. The first oxidation-resistant spacers235 a may be confinedly disposed or otherwise positioned within, thefirst undercut regions UC1.

The peripheral gate electrode 238 may include a peripheral sub-gate 220b and a peripheral metal pattern 225 bn that are stacked sequentially.According to the present embodiment, the peripheral sub-gate 220 b maybe disposed directly on the peripheral gate dielectric layer 217. Awidth of the peripheral metal pattern 225 bn may be smaller than widthsof the second gate mask pattern 231 and the peripheral sub-gate 220 b.Therefore, a pair of second undercut regions UC2 may be defined at bothsides of the peripheral metal pattern 225 bn, respectively. A pair ofsecond oxidation-resistant spacers 235 b may be disposed on bothsidewalls of the peripheral metal pattern 225 bn, respectively. The pairof second oxidation-resistant spacers 235 b may be disposed between bothedge regions of the second gate mask pattern 231 and both edge regionsof the peripheral sub-gate 220 b. The second oxidation-resistant spacers235 b may be confinedly disposed, or otherwise positioned within, thesecond undercut regions UC2.

According to an embodiment, the thickness of the firstoxidation-resistant spacer 235 a at the sidewall of the control metalpattern 225 an may be different from that of the secondoxidation-resistant spacer 235 b at the sidewall of the peripheral metalpattern 225 bn. For example, the thickness of the secondoxidation-resistant spacer 235 b may be thicker than that of the firstoxidation-resistant spacer 235 a. An outer sidewall of the firstoxidation-resistant spacer 235 a may be recessed in a lateral directionto a larger extent relative to a sidewall of the first gate mask pattern230, as compared to the amount of recess of the secondoxidation-resistant spacer, relative to the sidewall of the second gatemask pattern 231.

The control metal pattern 225 an may comprise a metal having lowresistivity. For example, the control metal pattern 225 an may comprisetungsten, copper, another suitable metal, or combinations thereof. Thefirst gate mask pattern 230 may comprise a dielectric material having anetch selectivity with respect to the control metal pattern 225 an andthe control base gate 220 a. For example, the first gate mask pattern230 may comprise an oxide. The control base gate 220 a may include aconductive material having an etch selectivity with respect to thecontrol metal pattern 225 an. Also, the control base gate 220 a mayinclude a conductive material having a specific work function. Accordingto an embodiment, the second gate mask pattern 231, the peripheral metalpattern 225 bn and the peripheral sub-gate 220 b may be formed of thesame materials as the first gate mask pattern 230, the control metalpattern 225 an and the control base gate 220 a, respectively. The firstand second oxidation-resistant spacers 235 a and 235 b may be formed ofthe same material as the first and second oxidation-resistant spacers135 a and 135 b of FIG. 1.

The tunnel dielectric layer 205 may comprise an oxide (e.g., a thermaloxide) and/or an oxynitride, etc. The charge storage layer 210 mayinclude a dielectric material having charge trap storing capability. Forexample, the charge storage layer 210 may include a silicon nitride, asilicon oxide including nano dots and/or an insulating metal nitride(e.g., a hafnium oxide, etc.), etc. The nano dots may include asemiconductor material and/or a metal, etc. The blocking dielectriclayer 215 may include a high-k material (e.g., an insulating metal oxidesuch as an aluminum oxide and/or a hafnium oxide, etc.) which has ahigher dielectric constant than that of the tunnel dielectric layer 205.In addition, the blocking dielectric layer 215 may further include abarrier dielectric material (e.g., oxide, etc.) having a larger bandgapenergy than the high-k material.

The charge storage layer 210 may includes a dielectric material havingcharge traps in such manner that the charge storage layer 210 may beconnected to a charge storage layer in a neighboring or adjacent cellgate pattern. For example, as illustrated in FIG. 9, the charge storagelayer 210 and the blocking dielectric layer 215 extend laterally beyondboth sidewalls of the control gate electrode 237, in a manner so as tobe continuously connected to the charge storage layer of the adjacentcell gate pattern and the blocking dielectric layer 215.

According to an embodiment, an energy barrier between the control basegate 220 a and the blocking dielectric layer 215 may be increased byadjusting a work function of the control base gate 220 a. For example,when a non-volatile memory cell according to embodiments of theinventive concept is n-metal oxide semiconductor (n-MOS) type, thecontrol base gate 220 a may include a conductive material having alarger work function than that of n-type silicon. For example, thecontrol base gate 220 a may include p-type silicon, p-typesilicon-germanium, a titanium nitride (TiN), a tantalum nitride (TaN), atantalum silicon nitride (TaSiN) and/or a tungsten nitride (WN), etc.According to an embodiment, when the control base gate 220 a may includesilicon or silicon-germanium, the control base gate 220 a may furtherinclude carbon.

The control gate dielectric layer 217 in the peripheral region maycomprise an oxide. A thickness of the control gate dielectric layer 217in the peripheral region may be different from that of the tunneldielectric layer 205 in the cell region.

An oxide layer 240 may be disposed on both sidewalls of the control basegate 220 a and the peripheral sub-gate 220 b. The oxide layer 240 mayinclude an oxide that is formed by oxidation of the both sidewalls ofthe gates 220 a and 220 b. First gate spacers 250 a may be disposed onboth sidewalls of the cell gate pattern CG, and second gate spacers 250b may be disposed on both sidewalls of the peripheral gate pattern PG.The first and second gate spacers 250 a and 250 b may comprise an oxide.According to an embodiment, the first and second gate spacers 250 a and250 b may not include silicon nitride.

Cell source/drain 245 regions may be defined in the first active portionACT1 of both sides of the first gate mask pattern 230. According to anembodiment, the cell source/drain 245 regions may be doped with adifferent type dopant from that of the first active portion ACT1 of thesubstrate. Alternatively, the cell source/drain 245 region may also bedefined as an inversion layer, which is formed by a fringe fieldgenerated by an operating voltage applied to the control gate electrode237. A peripheral source/drain 248 region may be disposed in the secondactive portion ACT2 of both sides of the second gate mask pattern 231.The peripheral source/drain 248 may be doped with a different typedopant from that of the second active portion ACT2 of the substrate. Theperipheral source/drain 248 may have a LDD structure. An interlayerdielectric layer 255 may be disposed on an entire surface of thesubstrate 100. The interlayer dielectric layer 255 may include an oxide.

According to the foregoing non-volatile memory device, the first andsecond oxidation-resistant spacers 235 a and 235 b are disposed on theboth sidewalls of the control and peripheral metal patterns 225 an and225 bn. Therefore, a non-volatile memory device having excellentreliability can be achieved by preventing the metal patterns 225 an and225 bn from oxidation. Also, the first and second oxidation-resistantspacers 235 a and 235 b are confinedly disposed in the undercut regionsUC1 and UC2 such that a non-volatile memory device optimized for highintegration density can be achieved.

FIG. 10 is a cross-sectional view illustrating a modified example of anon-volatile memory device according to another embodiment of theinventive concept.

Referring to FIG. 10, a control base gate 220 a′ included in a controlgate electrode 237′ may have a sidewall in a stepped shape as describedherein in connection with the embodiment of FIG. 3. In this case, afirst oxidation-resistant spacer 235 a′ may fill the first undercutregion UC1. Also, a sidewall of a peripheral sub-gate 220 b′ included ina peripheral gate electrode 238′ may have a stepped shape. According toan embodiment, the sidewall of the control base gate 220 a′ may have aflat shape and the sidewall of the peripheral sub-gate 220 b′ may have astepped shape, for example as described herein in connection with theembodiment of FIG. 4. In the embodiment of FIG. 10, the memory cells inthe first active portion have a charge storage layer 210 that iscontinuous between neighboring memory cells, as described in connectionwith the embodiment of FIG. 9.

FIG. 11 is a cross-sectional view illustrating another modified exampleof a non-volatile memory device according to another embodiment of theinventive concept.

Referring to FIG. 11, according to the present modified example, chargestorage layers 210 a associated with adjacent or neighboring cell gatepatterns CG may be spaced apart laterally by separating them from eachother. Likewise, blocking dielectric layers 215 a in the adjacent cellgate patterns CG may also be spaced apart laterally by separating themfrom each other.

FIG. 12 is a cross-sectional view illustrating still another modifiedexample of a non-volatile memory device according to another embodimentof the inventive concept.

Referring to FIG. 12, a control gate electrode 237 a may further includea first lower barrier pattern 270 a positioned between the control metalpattern 225 an and the control base gate 220 a. In addition, the controlgate electrode 237 a may further include a first upper barrier pattern275 a positioned between the first gate mask pattern 230 and the controlmetal pattern 225 an. Widths between sidewalls of the first lower andupper barrier patterns 270 a and 275 a may be greater than a width ofthe control metal pattern 225 an. Therefore, the pair of firstoxidation-resistant spacers 235 a may be disposed between both edgeregions of the first lower barrier pattern 270 a and both edge regionsof the first upper barrier pattern 275 a. The first lower and upperbarrier patterns 270 a and 275 a may be formed of the same materials asthose of the first lower and upper barrier patterns 170 a and 175 a ofFIG. 5, respectively. According to an embodiment, any one of the firstlower barrier pattern 270 a and the first upper barrier pattern 275 amay be omitted. In a case where the control gate electrode 237 includesthe first lower barrier pattern 270 a, the control base gate 220 a mayinclude a doped semiconductor material (e.g., doped silicon, dopedsilicon-germanium, etc.).

Similarly, a peripheral gate electrode 238 a may further include asecond lower barrier pattern 270 b positioned between the peripheralmetal pattern 225 bn and the peripheral sub-gate 220 b, and/or a secondupper barrier pattern 275 b positioned between the second gate maskpattern 231 and the peripheral metal pattern 225 bn. The secondoxidation-resistant spacers 235 b may be disposed between both edgeregions of the second lower barrier pattern 270 b and both edge regionsof the second upper barrier pattern 275 b. The second lower and upperbarrier patterns 270 b and 275 b may be formed of the same materials asthe first lower and upper barrier patterns 270 a and 275 a,respectively.

According to an embodiment, an air gap 257 may be formed betweenadjacent cell gate patterns CG. The air gap 257 may be covered with thefirst gate spacer 250 a. Such air gap 257 may also be formed between theadjacent cell gate patterns CG of the non-volatile memory devices shownin FIGS. 9 through 11, or of other embodiments described herein.

Subsequently, a method of fabricating a non-volatile memory deviceaccording to the present embodiment will be described with reference tothe following drawings.

FIGS. 13A through 13D are cross-sectional views illustrating a method offabricating a non-volatile memory device according to another embodimentof the inventive concept, and FIG. 14 is a flow chart illustrating amethod of forming an oxidation-resistant spacer and gate patterns of anon-volatile memory device according to another embodiment of theinventive concept.

Referring to FIG. 13A, a first active portion ACT1 in a cell region 50and a second active region ACT2 in a peripheral region 60 may be definedby forming a device isolation pattern (not illustrated) on or in thesubstrate 100. A tunnel dielectric layer 205, a charge storage layer 210and a blocking dielectric layer 215 may be sequentially formed on thefirst active portion ACT1. A peripheral gate dielectric layer 217 may beformed on the second active portion ACT2. According to an embodiment,the tunnel dielectric layer 205, the charge storage layer 210 and theblocking dielectric layer 215 may be sequentially formed on an entiresurface of the substrate having the first and second active portionsACT1 and ACT2. The second active portion ACT2 may be exposed by removingthe blocking dielectric layer 215, the charge storage layer 210 and thetunnel dielectric layer 205 in the peripheral region 60. At this time,the tunnel dielectric layer 205, the charge storage layer 210 and theblocking dielectric layer 217 in the cell region 50 may remain on thesubstrate. The peripheral gate dielectric layer 217 may be formed on theexposed second active portion ACT2. However, the inventive concept isnot limited thereto. Alternatively, the tunnel dielectric layer 205, thecharge storage layer 210 and the blocking dielectric layer 215 which arestacked sequentially, and the peripheral gate dielectric layer 217, mayalso be formed according to other methods.

Subsequently, a base conductive layer 220 and a metal layer 225 may beformed on the entire surface of the substrate 100. The base conductivelayer 220 may be formed directly on the blocking dielectric layer 215and the peripheral gate dielectric layer 217. Subsequently, a first gatemask pattern 230 on the metal layer 225 in the cell region 50 and asecond gate mask pattern 231 on the metal layer 225 in the peripheralregion 60 may be formed.

Referring to FIG. 13 b, a control metal pattern 225 a and a peripheralmetal pattern 225 b may be formed by etching the metal layer 225 usingthe gate mask patterns 230 and 231 as etching masks. The metal layer 225may be etched by the first dry etching process having a stronganisotropy.

Referring to FIG. 13C, both sidewalls of the control and peripheralmetal patterns 225 a and 225 b are etched in a lateral direction.Therefore, first undercut regions UC1 may be formed at both sides of thelaterally etched control metal pattern 225 an, and second undercutregions UC2 may be formed at both sides of the laterally etchedperipheral metal patters 225 a and 225 b. Both sidewalls of the controland peripheral metal patterns 225 a and 225 b may be etched laterally bya reactive dry etching process. The reactive dry etching process may bethe same as the reactive etching process described with reference toFIG. 6D.

Next, a method of forming oxide-resistant spacers and gate patterns willbe specifically described with reference to the flowchart of FIG. 14.

Referring to FIGS. 13C, 13D and 14, in operation S310, anoxidation-resistant layer is deposited on the substrate 100 having theundercut regions UC1 and UC2. The oxidation-resistant layer may bedeposited by a chemical vapor deposition process and/or an atomic layerdeposition process, or by another suitable process. Theoxidation-resistant layer may also be formed in the undercut regions UC1and UC2. In operation S312, the base conductive layers 220 of both sidesof the gate mask patterns 230 and 231 are exposed by etching theoxidation-resistant layer. At this time, first and second spacers 235 aand 235 b may be formed in the first and second undercut regions UC1 andUC2. The gate mask patterns 230 and 231 may also be exposed by removingthe oxidation-resistant layer on upper surfaces of the gate maskpatterns 230 and 231.

In operation S314, the exposed base conductive layer 220 may be etchedusing the gate mask patterns 230 and 231 as etching masks. Therefore, acontrol base gate 220 a is formed under the control metal pattern 225an, and a peripheral sub-gate 220 b is formed under the peripheral metalpattern 225 bn. Subsequently, in operation S316, a cleaning process maybe performed on the substrate 100. The first and secondoxidation-resistant spacers 235 a and 235 b may be formed so that theirrespective positions are confined to the first and second undercutregions UC1 and UC2 after the operation S312, the operation S314 and theoperation S316. Subsequently, in operation S318, a gate oxidationprocess may be performed on the substrate 100. Therefore, an oxide layer240 may be formed on both sidewalls of the control base gate 220 a andthe peripheral sub-gate 220 b. Thereafter, the peripheral source/drain248, the gate spacers 250 a and 250 b and the interlayer dielectriclayer 255 of FIG. 9 may be formed. When the cell source/drain 245 isdoped with a dopant, the cell source/drain 245 may also be formed.According to an embodiment, after the forming of the gate spacers 250 aand 250 b, the air gap 257 of FIG. 12 may also be formed betweenadjacent cell gate patterns CG.

As described above in the first embodiment, the degree of inclination ofthe sidewalls of the patterns 225 an and 230 stacked in the cell region50 may be different from that of the sidewalls of the patterns 225 bnand 231 stacked in the peripheral region 60. As a result, the thicknessof the oxidation-resistant layer on the sidewalls of the patterns 225 anand 230 stacked in the cell region 50 may be different from that of theoxidation-resistant layer on the sidewalls of the patterns 225 bn and231 stacked in the peripheral region 60. Therefore, the thickness of thefirst oxidation-resistant spacer 235 a may be different from that of thesecond oxidation-resistant spacer 235 b. For example, the thickness ofthe second oxidation-resistant spacer 235 b may be greater than that ofthe first oxidation-resistant spacer 235 a.

According to an embodiment, the thickness of an oxidation-resistantlayer on the sidewalls of the stacked patterns 225 an, 230, 225 bn and231 may be adjusted so that the control base gate 220 a′ and theperipheral sub-gate 220 b′, which have the sidewalls in a stepped shape,as shown in FIG. 10, may be achieved.

According to an embodiment, after the forming of the control base gate220 a and the peripheral sub-gate 220 b, the blocking dielectric layer215 and the charge storage layer 210 may be etched using the gate maskpatterns 230 and 231 as an etching mask. Therefore, the non-volatiledevice illustrated in FIG. 11 may be achieved.

A method of fabricating the non-volatile device shown in FIG. 12 willnow be described.

FIGS. 15A through 15C are cross-sectional views illustrating a method offabricating the non-volatile memory device shown in FIG. 12.

Referring to FIGS. 13A and 15A, a lower barrier layer may be formed on abase conductive layer 220 before forming a metal layer 225. The metallayer 225 may be formed on the base conductive layer 220. An upperbarrier layer may be formed on the metal layer 225 before forming gatemask patterns 230 and 231. The gate mask patterns 230 and 231 may beformed on the upper barrier layer.

The upper barrier layer, the metal layer 225 and the lower barrier layermay be etched using the gate mask patterns 230 and 231 as etching masks.Therefore, a first lower barrier pattern 270 a, a control metal pattern225 a and a first upper barrier pattern 275 a, which are sequentiallystacked under the first gate mask pattern 230, may be formed. Also, asecond lower barrier pattern 270 b, a peripheral metal pattern 225 b anda second upper barrier pattern 275 b, which are sequentially stackedunder the second gate mask pattern 231, may be formed.

Referring to FIG. 15B, first and second undercut regions UC1 and UC2 maybe formed by etching both sidewalls of the control and peripheral metalpatterns 225 a and 225 b laterally. At this time, the barrier patterns270 a, 270 b, 275 a and 275 b may have an etch selectivity with respectto the metal patterns 225 a and 225 b. Therefore, the first undercutregion UC1 may be formed between the first lower and upper barrierpatterns 270 a and 275 a, and the second undercut region UC2 may beformed between the second lower and upper barrier patterns 270 b and 275b.

Referring to FIG. 15C, subsequently, the operations shown in theflowchart of FIG. 14 may be performed. Therefore, oxidation-resistantspacers 235 a and 235 b may be formed in the undercut regions, a controlbase gate 220 a and a peripheral sub-gate 220 b may be formed. Also, anoxide layer 240 may be formed on both sidewalls of the control base gate220 a and the peripheral sub-gate 220 b. Thereafter, the cellsource/drain 245, the peripheral source/drain 248, the gate spacers 250a and 250 b and the interlayer dielectric layer 255 of FIG. 12 may beformed.

The nonvolatile memory devices disclosed in the first embodiment and thenonvolatile memory devices disclosed in the second embodiment which aredescribed above can be realized as a NOR-type non-volatile memory deviceor as a NAND-type non-volatile memory device, or as another type ofnon-volatile memory device.

Third Embodiment

In the present embodiment, like reference numerals in the foregoingembodiments refer to like elements.

FIG. 16A is a cross-sectional view illustrating a nonvolatile memorydevice according to still another embodiment of the inventive concept,and FIG. 16B is an enlarged view of portion A of FIG. 16A.

Referring to FIGS. 16A and 16B, in a cell region 50, a first width W1 ofa first gate mask pattern 130 is greater than a second width W2 of acontrol metal pattern 125 an in a control gate electrode 137. Thus, apair of first undercut regions UCa may be defined under both edgeregions of the first gate mask pattern 130, respectively. Also, the pairof first undercut regions UCa may be defined at both sides of thecontrol metal pattern 125 an, respectively.

A control base gate 120 a under the control metal pattern 125 an mayinclude a first lower portion and a second upper portion on a blockingdielectric layer 115 a. That is, the first portion of the control basegate 120 a may be disposed between the blocking dielectric layer 115 aand the second portion of the control base gate 120 a, and the firstportion of the control base gate 120 a may be wider than the secondportion of the control base gate 120 a. A third width W3 of the firstportion of the control base gate 120 a may be substantially equal to thefirst width W1 of the first gate mask pattern 130. A fourth width W4 ofthe second portion of the control base gate 120 a may be smaller thanthe first width W1 of the first gate mask pattern 130. The fourth widthW4 of the second upper portion of the control base gate 120 a may begreater than the width of the second width W2 of the control metalpattern 125 an. Therefore, the first undercut regions UCa extenddownwardly so that lower ends of the first undercut regions UCa may belocated at a level lower than that of a bottom surface of the controlmetal pattern 125 an.

More specifically, due to the second portion having the fourth width W4,the control base gate 120 a may include a first upper surface 122, andsecond upper surfaces 123 positioned at a level lower than that of thefirst upper surface 122. The first upper surface 122 may correspond toan upper surface of the second portion of the control base gate 120 a.The second upper surfaces 123 may respectively correspond to uppersurfaces of the first portion disposed at both sides of the secondportion. An inner surface of the first undercut region UCa may include abottom surface of one edge region of the first gate mask pattern 130, asidewall of the control metal pattern 125 an, a portion of an uppersurface 122 of the second upper portion of the control base gate 120 a,a sidewall of the second upper portion of the control base gate 120 a,and a portion of an upper surface 123 of the first lower portion of thecontrol base gate 120 a.

The width W4 of the second upper portion of the control base gate 120 amay be greater than the second width W2 of the control metal pattern 125an. Therefore, the inner surface of the first undercut region UCa mayfurther include one edge region of the first upper surface 122positioned beside the control metal pattern 125 an. FIGS. 16A and 16Billustrate that the first upper surface 122 of the second upper portionof the control base gate 120 a is flat. However, the inventive conceptis not limited thereto. According to an embodiment, an edge region ofthe first upper surface 122 included in the inner surface of the firstundercut region UCa may be positioned at a level lower than that of acentral region of the first upper surface 122.

A pair of first oxidation-resistant spacers 335 a may be respectivelydisposed in the pair of the first undercut regions UCa defined in thecell gate pattern CG. The first oxidation-resistant spacers 335 a may beformed of the same material as the first oxidation-resistant spacers 135a of the first embodiment. The pair of the first oxidation-resistantspacers 335 a may cover both sidewalls of the control metal pattern 125an. Also, the pair of the first oxidation-resistant spacers 335 a maycover both ends of an interface between the control metal pattern 125 anand the control base gate 120 a. Since the first oxidation-resistantspacers 335 a cover the both sidewalls of the control metal pattern andthe both ends of the interface, it is possible to minimize a pathwaythrough which oxygen may permeate into the control metal pattern 125 an.As a result, the first oxidation-resistant spacers 335 a can prevent theoxidation of the control metal pattern 125 an caused by oxidationprocess and/or oxide, thereby enabling to realize a nonvolatile memorydevice having enhanced reliability.

Likewise, as illustrated in FIG. 16A, a width of a peripheral metalpattern 125 bn of a peripheral gate electrode 138 in a peripheral region60 may be smaller than a width of the second gate mask pattern 131.Therefore, a pair of second undercut regions UCb may be defined underboth edge regions of the second gate mask pattern 131. A peripheralsub-gate 120 b included in the peripheral gate electrode 138 may alsoinclude a first portion and a second portion. The width of the firstportion of the peripheral sub-gate 120 b may be substantially equal to,or greater than, the width of the second gate mask pattern 131, and thewidth of the second portion of the peripheral sub-gate 120 b may be lessthan the width of the second gate mask pattern 131. Accordingly, thepair of the second undercut regions UCb may extend in a downwarddirection. That is, lower ends of the pair of second undercut regionsUCb may be positioned at level lower than that of a bottom surface ofthe peripheral metal pattern 125 bn. A pair of secondoxidation-resistant spacers 335 b may be respectively disposed in thepair of second undercut regions UCb. Accordingly, the pair of secondoxidation-resistant spacers 335 b may cover both sidewalls of theperipheral metal pattern 125 bn, and both ends of an interface betweenthe peripheral metal pattern 125 bn and the peripheral sub-gate 120 b.This prevents the peripheral metal pattern 125 bn from becoming oxidizedas a result of subsequent oxidation process and/or the presence ofoxides, thus providing for a nonvolatile memory device having enhancedreliability. The second oxidation-resistant spacers 335 b may be formedof the same material as the first oxidation-resistant spacers 335 a.

According to an embodiment, the first oxidation-resistant spacer 335 amay be confinedly disposed in the first undercut region UCa. The secondoxidation-resistant spacer 335 b may be confinedly disposed in thesecond undercut region UCb.

Various modified examples of the first embodiment may be applied to thenonvolatile memory device according to the present embodiment. Forexample, a thickness of the first oxidation-resistant spacer 335 apositioned at the sidewall of control metal pattern 125 an may differfrom a thickness of the second oxidation-resistant spacer 335 bpositioned at the sidewall of the peripheral metal pattern 125 bn.According to an embodiment, the thickness of the secondoxidation-resistant spacer 335 b may be greater than the thickness ofthe first oxidation-resistant spacer 335 a.

According to an embodiment, a sidewall of the first portion of thecontrol base gate 120 a under the first undercut region UCa may have astepped shape in a manner similar to the sidewall of the control basegate (see 120 a′ in FIG. 3). In this case, at least a lower portion ofthe first portion of the control base gate 120 a may have a greaterwidth than the first width W1 of the first gate mask pattern 130.Likewise, the sidewall of the first portion of the peripheral sub-gate120 b under the second undercut region UCb may have a stepped shape.

According to an embodiment, as illustrated in FIG. 5, air gaps may beprovided between neighboring cell gate patterns CG of the embodiment ofFIG. 16A.

The undercut regions UCa and UCb and the oxidation-resistant spacers 335a and 335 b according to the present embodiment may be applicable to thenonvolatile memory devices described in the second embodiment.

Hereinafter, a modified example of a nonvolatile memory device accordingto an embodiment will be described with reference to accompanyingdrawings.

FIG. 17A is a cross-sectional view illustrating a modified example of anonvolatile memory device according to still another embodiment of theinventive concept, and FIG. 17B is an enlarged view of portion B of FIG.17A.

Referring to FIGS. 17A and 17B, a control gate electrode 137 a′ in acell region 50 may include a control base gate 120 a, a first lowerbarrier pattern 170 a′, a control metal pattern 125 an, and a firstupper barrier pattern 175 a′, which are stacked. The first lower barrierpattern 170 a′ and the first upper barrier pattern 175 a′ may be formedof the same materials as the first lower barrier pattern 170 a and thefirst upper barrier pattern 175 a, respectively, which are illustratedand described above in connection with the embodiment of FIG. 5. In thecase where the control gate electrode 137 a′ includes the first lowerbarrier pattern 170 a′, the control base gate 120 a may be formed of asemiconductor doped with a dopant (e.g., silicon doped with a dopant,etc), a semiconductor doped with a dopant and carbon (e.g., silicondoped with a dopant and carbon), or other suitable material.

A width Wa of the first lower barrier pattern 170 a′ may be less thanthe first width W1 of the first gate mask pattern 130. Likewise, a widthWb of the first upper barrier pattern 175 a′ may also be less than thefirst width W1 of the first gate mask pattern 130. As a result, asillustrated in FIG. 17B, a pair of first undercut regions UCa′ definedat both sides of the control metal pattern 125 an may extend downwardlyand upwardly in a vertical direction. The first undercut regions UCa′are defined under both edge regions of the first gate mask pattern 130,respectively. The widths Wa and Wb of the first lower and upper barrierpatterns 170 a′ and 175 a′ may be greater than a second width W2 of thecontrol metal pattern 125 an.

A pair of first oxidation-resistant spacers 335 a may be disposed in thepair of first undercut regions UCa′, respectively. The pair of firstoxidation-resistant spacers 335 a may cover both sidewalls of thecontrol metal pattern 125 an, both ends of an interface between thecontrol metal pattern 125 an and the first lower barrier pattern 170 a′,and both ends of an interface between the control metal pattern 125 anand the first upper barrier pattern 175 a′. In addition, the pair offirst oxidation-resistant spacers 335 a may also cover both sidewalls ofthe first lower barrier pattern 170 a′ and both sidewalls of the firstupper barrier pattern 175 a′. Thus, it is possible to prevent thecontrol metal pattern 125 an from becoming oxidized.

Similarly, a peripheral gate electrode 138 a′ in a peripheral region 60may include a peripheral bottom gate 111 a, a peripheral sub-gate 120 b,a second lower barrier pattern 170 b′, a peripheral metal pattern 125bn, and a second upper barrier pattern 175 b′, which are sequentiallystacked. Here, a width of the second lower barrier pattern 170 b′ may besmaller than that of the second gate mask pattern 131. A width of thesecond upper barrier pattern 175 b′ may also be smaller than that of thesecond gate mask pattern 131. Accordingly, the second undercut regionsUCb′ defined at both sides of the peripheral metal pattern 125 bn mayextend downwardly and upwardly in a vertical direction. The secondundercut regions UCb′ are defined under both edge regions of the secondgate mask pattern 131, respectively. The widths of the second lower andupper barrier patterns 170 b′ and 175 b′ may be greater than that of theperipheral metal pattern 125 bn. The second lower and upper barrierpatterns 170 b′ and 175 b′ may be formed of the same materials as thefirst lower and upper barrier patterns 170 a′ and 175 a′, respectively.

A pair of second oxidation-resistant spacers 335 b may be disposed inthe second undercut regions UCb′, respectively. The pair of secondoxidation-resistant spacers 335 b may cover both sidewalls of theperipheral metal pattern 125 bn, both ends of the interface between theperipheral metal pattern 125 bn and the second lower barrier pattern 170b′, and both ends of the interface between the peripheral metal pattern125 bn and the second upper barrier pattern 175 b′. In addition, thepair of second oxidation-resistant spacers 335 b may cover bothsidewalls of the second lower barrier pattern 170 b′ and both sidewallsof the second upper barrier pattern 175 b′. Therefore, the oxidation ofthe peripheral metal pattern 125 bn can be prevented by the pair ofsecond oxidation-resistant spacers 335 b.

The above-described modified examples of the first embodiment may beapplicable to the nonvolatile memory device of FIGS. 17A and 17B, and toother embodiments described herein.

The undercut regions UCa′ and UCb′ and the oxidation-resistant spacers335 a and 335 b, which are illustrated in FIGS. 17A and 17B, may also beapplied to the nonvolatile memory device of the second embodiment.

Hereinafter, a method of fabricating a nonvolatile memory deviceaccording to the present embodiment will be described. This method maybe similar to the method described with reference to FIGS. 6A to 6C.

FIG. 18A is a cross-sectional view illustrating a nonvolatile memorydevice according to still another embodiment of the inventive concept,and FIG. 18B is an enlarged view of portion C of FIG. 18A.

Referring to FIGS. 6C, 18A and 18B, the metal layer 125 of FIG. 6B maybe etched using the first and second gate mask patterns 130 and 131 asan etch mask, thereby forming the control metal pattern (125 a of FIG.6C) in the cell region 50 and the peripheral metal pattern (125 b ofFIG. 6C) in the peripheral region 60. An upper portion of the baseconductive layer 120, which is disposed at both sides of the control andperipheral metal patterns 125 a and 125 b, may be etched. As a result, afirst protrusion may be defined under the control metal pattern 125 a,and a second protrusion may be defined under the peripheral metalpattern 125 b. The first protrusion 121 may correspond to a portion ofthe base conductive layer 120 under the control metal pattern 125 a, andthe second protrusion 121 may correspond to a portion of the baseconductive layer 120 under the peripheral metal pattern 125 b.

Both sidewalls of the control and peripheral metal patterns 125 a and125 b are etched in a lateral direction. At this time, both sidewalls ofthe first protrusion 121 and both sidewalls of the second protrusion 121can also become etched in a lateral direction. In this manner, the firstundercut regions UCa and the second undercut regions UCb illustrated inFIG. 18A may be formed. As illustrated in FIG. 18B, the first protrusion121 which is etched laterally may be smaller in width than that of thefirst gate mask pattern 130. Therefore, the first undercut region UCaillustrated in FIG. 18B may be formed. Likewise, the second protrusionwhich is etched laterally may be smaller in width than that of thesecond gate mask pattern 131. Thus, the second undercut region UCb whichis illustrated in FIG. 18A and described with reference to FIG. 16A maybe formed. A pair of the first undercut regions UCa may be respectivelyformed at both sides of the laterally etched control metal pattern 125an, and a pair of the second undercut regions UCb may be respectivelyformed at both sides of the laterally etched peripheral metal pattern125 bn.

During the etching process for forming the undercut regions UCa and UCb,the first and second protrusions may be smaller in etch rate than thecontrol and peripheral metal patterns 125 a and 125 b. Thus, asillustrated in FIG. 18B, the width of the laterally etched firstprotrusion 121 may be greater than the width of the laterally etchedcontrol metal pattern 125 an. Also, the width of the laterally etchedsecond protrusion may be greater than the width of the laterally etchedperipheral metal pattern 125 bn.

The sidewalls of the first and second protrusions of the base conductivelayer 120, and the sidewalls of the control and peripheral metalpatterns 125 a and 125 b may be laterally etched by reactive dry etchingor wet etching. The reactive dry etching may have dominant isotropy.

The subsequent fabrication processes may be performed in a mannersimilar to those described with reference to FIGS. 6D to 6G, and FIG. 7.

FIG. 19A is a cross-sectional view illustrating a modified example of amethod of fabricating a nonvolatile memory device according to stillanother embodiment of the inventive concept, and FIG. 19B is an enlargedview of portion D of FIG. 19A. The method of fabricating the nonvolatilememory device may include the methods described herein with reference toFIGS. 8A and 8B.

Referring to FIGS. 8B, 19A and 19B, after forming the first and secondlower barrier patterns 170 a and 170 b, the control and peripheral metalpatterns 125 a and 125 b, and the first and second upper barrierpatterns 175 a and 175 b, which are illustrated in FIG. 8B, bothsidewalls of the control and peripheral metal patterns 125 a and 125 bmay be etched in a lateral direction. At this time, the first and secondlower barrier patterns 170 a and 170 b and the first and second upperbarrier patterns 175 a and 175 b may also be etched in a lateraldirection. Thus, the laterally etched first lower and upper barrierpatterns 170 a′ and 175 a′ may be smaller in width than the first gatemask pattern 130, and the laterally etched second lower and upperbarrier patterns 170 b′ and 175 b′ may be smaller in width than thesecond gate mask pattern 131. As a result, a pair of first undercutregions UCa′ are formed under both edge regions of the first gate maskpattern 130, and a pair of second undercut regions UCb′ are formed underboth edge regions of the second gate mask pattern 131.

During the etching process for forming the undercut regions UCa′ andUCb′, the barrier patterns 170 a, 170 b, 175 a and 175 b may have etchrates that are less than etch rates of the control and peripheral metalpatterns 125 a and 125 b.

The subsequent fabrication processes may be performed in a mannersimilar to those described with reference to FIG. 8D.

Fourth Embodiment

In the present embodiment, like reference numerals in the foregoingembodiments refer to like elements.

FIG. 20 is a cross-sectional view illustrating a nonvolatile memorydevice according to yet another embodiment of the inventive concept.

Referring to FIG. 20, a peripheral gate electrode 138 k in a peripheralregion 60 may include a peripheral bottom gate 111 a, a peripheralsub-gate 120 k, and a peripheral metal pattern 125 bk, which are stackedin sequence. An interlayer dielectric pattern 116 b may be disposedbetween the peripheral bottom gate 111 a and the peripheral sub-gate 120k. The peripheral metal pattern 125 bk may fill an opening 117 a thatpenetrates the peripheral sub-gate 120 k and the interlayer dielectricpattern 115 b. As a result, the peripheral metal pattern 125 bk may bein direct contact with the peripheral sub-gate 120 k and the peripheralbottom gate 111 a. The peripheral sub-gate 120 k and the peripheralmetal pattern 125 bk may be formed of the same material layer as thoseof the control base gate 120 a and the control metal pattern 125 an inthe control gate electrode 137 in the cell region 50, respectively. Apair of second oxidation-resistant spacers 135 b may be disposed insecond undercut regions UC2 defined at both sides of the peripheralmetal pattern 125 bk, respectively.

The peripheral gate electrode 138 k of the nonvolatile memory deviceaccording to the present embodiment may be applicable to the modifiedexamples of the first embodiment or to the nonvolatile memory devices ofthe third embodiment, or to other embodiments described herein.

FIGS. 21A and 21B area cross-sectional views illustrating a method offabricating a nonvolatile memory device according to yet anotherembodiment of the inventive concept. The fabricating method according tothe present embodiment may include the methods described with referenceto FIG. 6A.

Referring to FIGS. 6A and 21A, a blocking dielectric layer 115 and abase conductive layer 120 may be sequentially formed on a substratehaving the first and second semiconductor patterns 110 and 111 of FIG.6A.

Referring to FIG. 21B, the base conductive layer 120 and the blockingdielectric layer 115 in a peripheral region 60 may be sequentiallypatterned to form an opening 117 a exposing the second semiconductorpattern 111. Thereafter, a metal layer 125 filling the opening 117 a maybe formed on the substrate 100.

First gate mask patterns 130 may be formed on the metal layer 125 in thecell region 50, and a second gate mask pattern 131 may be formed on themetal layer 125 in the peripheral region 60. The subsequent fabricationprocesses may be performed in a manner similar to those described withreference to FIGS. 6C to 6G and FIG. 7. Alternatively, subsequentprocesses may be performed in a manner similar to those described withreference to the third embodiment.

Fifth Embodiment

In the present embodiment, an example of realizing the non-volatilememory devices of the above-described first to fourth embodiments as aNAND-type non-volatile memory device will be described.

FIG. 22 is a cross-sectional view illustrating a non-volatile memorydevice according to another embodiment of the inventive concept.

Referring to FIG. 22, a first selection gate pattern GSG and a secondselection gate pattern SSG may be disposed on a first active portionACT1 defined in a cell region 50 of a substrate 100. A plurality of cellgate patterns CG may be disposed on the first active portion ACT1between the first and second selection gate patterns GSG and SSG. Acommon source CSR may be disposed in the first active portion ACT1 of aside of the first selection gate pattern GSG, and a common drain CDR maybe disposed in the first active portion ACT1 of a side of the secondselection gate pattern SSG. The first selection gate pattern GSG, theplurality of cell gate patterns CG and the second selection gate patternSSG may be disposed on the first active portion ACT1 between the commonsource CSR and the common drain CDR. A cell source/drain 145 may bedisposed in the first active portion ACT1 of both sides of the each cellgate pattern CG. The first selection gate pattern GSG may be included ina first selection transistor, and the cell gate patterns CG may beincluded in non-volatile memory cells, respectively. The secondselection gate pattern SSG may be included in a second selectiontransistor. The first selection transistor, the non-volatile memorycells and the second selection transistor may constitute a cell string.

The first selection gate pattern GSG may include a first selection gatedielectric and a first selection gate electrode 137 g which are stackedsequentially. The first selection gate electrode 137 g may include afirst sub-gate 110 g, a second sub-gate 120 g and a third sub-gate 125 gwhich are stacked sequentially. Also, the first selection gate patternGSG may further include a first selection mask pattern disposed on thethird sub-gate 125 g. The third sub-gate 125 g may include the samemetal as a control metal pattern of the cell gate pattern CG. A width ofthe third sub-gate 125 g may be less than widths of the first selectionmask pattern and the second sub-gate 120 a. Therefore, first selectionundercut regions may be defined at both sides of the third sub-gate 125g. A pair of first selection oxidation-resistant spacers 135 g may bedisposed on both sidewalls of the third sub-gate 125 g. The pair offirst selection oxidation-resistant spacers 135 g may be confinedlydisposed in the first selection undercut regions. A first selectioninterlayer pattern may be disposed between the first and secondsub-gates 110 g and 120 g. In this case, the second sub-gate 120 g maybe connected to the first sub-gate 110 g via a first selection openingpenetrating the first selection interlayer pattern.

Likewise, the second selection gate pattern SSG may include a secondselection gate dielectric, a second selection gate electrode 137 s and asecond selection mask pattern which are stacked sequentially. The secondselection gate electrode 137 s may include a first sub-gate 110 s, asecond sub-gate 120 s and a third sub-gate 125 s which are stackedsequentially. The third sub-gate 125 s of the second selection gatepattern SSG may include the same metal material as that of the controlmetal pattern. Second selection undercut regions may be defined at bothsides of the third sub-gate 125 s of the second selection gate patternSSG, and second selection oxidation-resistant spacers 135 s may bedisposed on both sidewalls of the third sub-gate 125 s of the secondselection gate pattern SSG. The second selection oxidation-resistantspacers 135 s may be confinedly disposed in the second selectionundercut regions. The first, second and third sub-gates 110 s, 120 s and125 s of the second selection gate pattern SSG may also be electricallyconnected to each other.

The first sub gates 110 g and 110 s of the first and second selectiongate patterns GSG and SSG may include the same semiconductor material asa charge storage layer of the cell gate pattern CG. The second sub-gates120 g and 120 s may include the same material as a control base gate ofthe cell gate pattern CG, and the third sub-gates 125 g and 125 s mayinclude the same metal as the control metal pattern of the cell gatepattern CG. The first and second selection mask patterns may be formedof the same material as a first gate mask pattern of the cell gatepattern CG.

A peripheral transistor including the peripheral gate pattern PG shownin FIG. 1 may be disposed in the peripheral region 60. First gatespacers may be disposed on both sidewalls of the selection gate patternsGSG and SSG and the cell gate patterns CG. At this time, an air gap 157covered with the gate spacers may also be formed between the cell gatepatterns CG. However, the inventive concept is not limited thereto. Inother embodiments, the air gap 157 need not be formed.

A first interlayer dielectric layer 155 may be disposed on an entiresurface of the substrate 100. A common source line 160 may beelectrically connected to the common source CSR by penetrating the firstinterlayer dielectric layer 155. A second interlayer dielectric layer162 may be disposed on the first interlayer dielectric layer 155 and thecommon source line 160. A first contact plug 165 may be electricallyconnected to the common drain CDR by continuously penetrating the secondand first interlayer dielectric layers 162 and 155 in the cell region50. A second contact plug 166 may be electrically connected to aperipheral source/drain 148 by continuously penetrating the second andfirst interlayer dielectric layers 162 and 155 in the peripheral region60. A bit line 180 may be electrically connected to the first contactplug 165 by being disposed on the second interlayer dielectric layer 162in the cell region 50. An interconnection line 181 may be electricallyconnected to the second contact plug 166 by being disposed on the secondinterlayer dielectric layer 162 in the peripheral region 60.

In the embodiment depicted in FIG. 22, the cell gate pattern CG and theperipheral gate pattern PG were illustrated as the cell gate pattern CGand the peripheral gate pattern PG of FIG. 1. However, the inventiveconcept is not limited thereto. The cell gate pattern CG and theperipheral gate pattern PG of FIG. 22 may be substituted by any one ofthe cell gate patterns CG and peripheral gate patterns PG of theembodiments illustrated and described herein, including the embodimentsdescribed in connection with FIGS. 2-5, FIGS. 9-12, FIG. 17 a or FIG. 18a. In this case, the selection gate patterns GSG and SSG may havesubstantially the same shape as the peripheral gate pattern PG.

FIG. 23 is a cross-sectional view illustrating a modified example of anonvolatile memory device according to yet another embodiment of theinventive concept.

Referring to FIG. 23, a peripheral gate pattern PG of the nonvolatilememory device according to this modified example may have the same shapeas the peripheral gate pattern PG having the peripheral gate electrode138 k which is illustrated in FIG. 20. In this case, a third sub-gate125 g′ of a first selection gate electrode 137 g′ may fill a firstselection opening which sequentially penetrates a second sub-gate 120 gand a first selection interlayer pattern. Accordingly, the thirdsub-gate 125 g′ of the first selection gate electrode 137 g′ may be indirect contact with a first sub-gate 110 g of the first selection gateelectrode 137 g′.

Likewise, a third sub-gate 125 s′ of a second selection gate electrode137 s′ may fill a second selection opening which sequentially penetratesa second sub-gate 120 s and a second selection interlayer pattern.Accordingly, the third sub-gate 125 s′ of the second selection gateelectrode 137 s′ may be in direct contact with a first sub-gate 110 s ofthe second selection gate electrode 137 s′.

The non-volatile memory devices disclosed in the foregoing embodimentsmay be realized in various types of semiconductor packages. Examples ofthe packages of the non-volatile memory devices according to theembodiments of the inventive concept may include package on package(PoP), ball grid arrays (BGAs), chip scale packages (CSPs), a plasticleaded chip carrier (PLCC), a plastic dual in-line package (PDIP), a diein waffle pack, a die in wafer form, a chip on board (COB), a ceramicdual in-line package (CERDIP), a plastic metric quad flat pack (MQFP), athin quad flat pack (TQFP), a small outline package (SOP), a shrinksmall outline package (SSOP), a thin small outline package (TSOP), athin quad flat package (TQFP), a system in package (SIP), a multi chippackage (MCP), a wafer-level fabricated package (WFP), a wafer-levelprocessed package (WSP) and other suitable semiconductor packages.

A package, on which a non-volatile memory device according to theembodiments of the inventive concept is mounted, may also furtherinclude a controller and/or a logic device or the like which control thenon-volatile memory device.

FIG. 24 is a block diagram illustrating an example of an electronicsystem including a non-volatile memory device based on the technicalidea of the inventive concept.

Referring to FIG. 24, the electronic system 1100 according to anembodiment of the inventive concept may include a controller 1110, aninput/output (I/O) device 1120, a memory device 1130, an interface 1140,and a bus 1150. The controller 1110, the input/output device 1120, thememory device 1130 and/or the interface 1140 may be interconnected toeach other through the bus 1150. The bus 1150 corresponds to a datatransfer path.

The controller 1110 includes at least one of a micro processor, adigital signal processor, a micro controller and other logic devicescapable of performing similar functions to the above elements. Theinput/output device 1120 may include a key pad, a keyboard and a displaydevice, etc. The memory device 1130 may store data and/or commands, etc.The memory device 1130 may include at least one of non-volatile memorydevices disclosed in the foregoing embodiments. Also, the memory device1130 may further include another kind of memory device (e.g., aphase-change memory device, a magnetic memory device, a dynamic randomaccess memory (DRAM) device and/or a static random access memory (SRAM)device, etc.). The interface 1140 may serve to transmit/receive datato/from a communication network. The interface 1140 may have a wire orwireless type. For example, the interface 1140 may include an antenna orwire/wireless transceivers, etc. Although not illustrated, theelectronic system 1100, which is a working memory device for improvingan operation of the controller 1110, may further include a high speedDRAM device and/or SRAM device, etc.

The electronic system 1100 may be applied to a personal digitalassistant (PDA), a portable computer, a web tablet, a wireless phone, amobile phone, a digital music player, a memory card and all electronicproducts which may transmit and/or receive data in a wirelessenvironment.

FIG. 25 is a block diagram illustrating an example of a memory cardincluding a non-volatile memory device based on the technical idea ofthe inventive concept.

Referring to FIG. 25, the memory card 1200 according to an embodiment ofthe inventive concept includes a memory device 1210. The memory device1210 may include at least one of non-volatile memory devices accordingto the foregoing embodiments. Also, the memory device 1210 may furtherinclude another kind of memory device (e.g., a phase-change memorydevice, a magnetic memory device, a DRAM device and/or a SRAM device,etc.). The memory card 1200 may include a memory controller 1220 whichcontrols various data exchanges between a host and the memory device1210.

The memory controller 1220 may include a processing unit 1222 thatcontrols overall operations of the memory card. Also, the memorycontroller 1220 may include a SRAM 1221 which is used as a workingmemory of the processing unit 1222. In addition, the memory controller1220 may further include a host interface 1223 and a memory interface1225. The host interface 1223 may have a data exchange protocol betweenthe memory card 1200 and the host. The memory interface 1225 may connectthe memory controller 1220 with the memory device 1210. Furthermore, thememory controller 1220 may further include an error correction code(ECC) 1224 processor. The error correction code 1224 processor maydetect and correct an error in the data read out from the memory device1210. Although not illustrated, the memory card 1200 may further includea read only memory (ROM) device which stores code data for interfacingwith the host. The memory card 1200 may be used for a portable datastorage card. Alternatively, the memory card 1200 may also be realizedas a solid state disk (SSD) which can substitute a hard disk of acomputer system.

According to the foregoing non-volatile memory device, the pair of firstoxidation-resistant spacers is disposed at both sidewalls of the controlmetal pattern. The oxidation-resistant spacers prevent the control metalpattern from becoming oxidized during subsequent gate oxidationprocesses or caused by subsequent exposure to oxide, etc. Also, thefirst oxidation-resistant spacers are confined in position to a regionthat is defined in a horizontal direction between both edge regions ofthe control base gate or between both edge regions of the gate maskpattern which are disposed under and above the control metal pattern.This enables further minimization of any increase in the line width of acell gate pattern. As a result, a non-volatile memory device havingsuperior reliability and that is optimized for high integration densitycan be achieved. Also, the control gate electrode includes the controlmetal pattern having low resistivity, thereby enabling high-speedoperation in the non-volatile memory device.

While the inventive concepts have been particularly shown and describedwith reference to exemplary embodiments thereof, it will be understoodby those of ordinary skill in the art that various changes in form anddetails may be made therein without departing from the spirit and scopeof the inventive concepts as defined by the following claims. Therefore,the disclosed subject matter is to be considered illustrative and notrestrictive.

1. A non-volatile memory device comprising: a substrate; a control gateelectrode on the substrate; a charge storage region between the controlgate electrode and the substrate; a control gate mask pattern on thecontrol gate electrode; the control gate electrode comprising a controlbase gate and a control metal gate on the control base gate; a width ofthe control metal gate being less than a width of the control gate maskpattern; and an oxidation-resistant spacer at sidewalls of the controlmetal gate positioned between the control gate mask pattern and thecontrol base gate.
 2. The non-volatile memory device of claim 1 whereina combined width of the control metal gate and a width of theoxidation-resistant spacer at first and second sidewalls of the controlmetal gate is less than the width of the control gate mask pattern. 3.The non-volatile memory device of claim 1 wherein a combined width ofthe control metal gate and a width of the oxidation-resistant spacer atfirst and second sidewalls of the control metal gate is equal to thewidth of the control gate mask pattern.
 4. The non-volatile memorydevice of claim 1 wherein a width of the oxidation-resistant spacer isless than one-half a width of a narrowest portion of the control metalgate.
 5. The non-volatile memory device of claim 1 further comprising alower barrier layer pattern between the control base gate and thecontrol metal gate.
 6. The non-volatile memory device of claim 5 whereinthe lower barrier layer pattern is of a thickness that is less thanone-half a thickness of the control metal gate.
 7. The non-volatilememory device of claim 5 wherein the lower barrier layer pattern is of awidth that is less than the width of the control gate mask pattern. 8.The non-volatile memory device of claim 1 further comprising an upperbarrier layer pattern between the control metal gate and the gate maskpattern.
 9. The non-volatile memory device of claim 8 wherein the upperbarrier layer pattern is of a thickness that is less than one-half athickness of the control metal gate.
 10. The non-volatile memory deviceof claim 8 wherein the upper barrier layer pattern is of a width that isless than the width of the control gate mask pattern.
 11. Thenon-volatile memory device of claim 1 wherein the control base gateincludes a lower portion and an upper portion, wherein the upper portionis of a width that is less than a width of the lower portion.
 12. Thenon-volatile memory device of claim 11 wherein the oxidation resistantspacer covers a top surface and sidewall surface of the upper portion ofthe control base gate.
 13. The non-volatile memory device of claim 1further comprising an insulative layer on the control gate electrode.14. The non-volatile memory device of claim 13 wherein a memory cellregion of the memory device includes multiple control gate electrodes,and wherein air gaps are present in the insulative layer betweenneighboring control gate electrodes.
 15. The non-volatile memory deviceof claim 1 wherein the charge storage region comprises a tunneldielectric layer on the substrate, a floating gate on the tunneldielectric layer and a blocking layer on the floating gate.
 16. Thenon-volatile memory device of claim 15 wherein the floating gate andblocking layer are patterned to have sidewalls that are aligned withsidewalls of the control base gate.
 17. The non-volatile memory deviceof claim 15 further comprising an oxidation layer on the sidewalls ofthe floating gate.
 18. The non-volatile memory device of claim 1 whereinthe charge storage region comprises a tunnel dielectric layer on thesubstrate, a dielectric charge storage layer on the tunnel dielectriclayer and a blocking layer on the dielectric charge storage layer. 19.The non-volatile memory device of claim 18 wherein the charge-storageregion comprises a ONO-type structure
 20. The non-volatile memory deviceof claim 18 wherein the dielectric charge storage layer and the blockinglayer are patterned to have sidewalls that are aligned with sidewalls ofthe control base gate.
 21. The non-volatile memory device of claim 1further comprising an oxidation layer on sidewalls of the control basegate.
 22. The non-volatile memory device of claim 1 wherein the memorydevice comprises a memory cell region and wherein the control gateelectrode and the control gate mask pattern are located in the memorycell region and wherein the memory device further comprises a peripheralregion including: a peripheral gate electrode on the substrate in theperipheral region; the peripheral gate electrode comprising a peripheralbase gate and a peripheral metal gate on the peripheral base gate; aperipheral gate mask pattern on the peripheral gate electrode; a widthof the peripheral metal gate being less than a width of the peripheralgate mask pattern; and an oxidation-resistant spacer at sidewalls of theperipheral metal gate and below the peripheral gate mask pattern. 23.The non-volatile memory device of claim 22 wherein the peripheral basegate is a same material as the control base gate, wherein the peripheralmetal gate is a same material as the control metal gate, and wherein theoxidation-resistant spacer at sidewalls of the peripheral metal gate isa same material as the oxidation-resistant spacer at sidewalls of thecontrol metal gate.
 24. The non-volatile memory device of claim 22wherein a thickness of the oxidation-resistant spacer at sidewalls ofthe peripheral metal gate is greater than a thickness of theoxidation-resistant spacer at sidewalls of the control metal gate. 25.The non-volatile memory device of claim 22 wherein at least one of thecontrol base gate and the peripheral base gate includes a lower portionand an upper portion, wherein the upper portion is of a width that isless than a width of the lower portion.
 26. The non-volatile memorydevice of claim 22 wherein the peripheral gate electrode furthercomprises: a peripheral bottom gate on the substrate between theperipheral base gate and the substrate; a peripheral gate dielectriclayer between the peripheral bottom gate and the substrate; and aninterlayer dielectric layer pattern between the peripheral base gate andthe peripheral bottom gate, wherein the peripheral metal gate directlycontacts the peripheral bottom gate through an opening in the peripheralbase gate and in the dielectric layer pattern.
 27. The non-volatilememory device of claim 1 wherein the oxidation-resistant spacercomprises nitride.
 28. The non-volatile memory device of claim 27wherein the oxidation-resistant spacer comprises insulating nitride. 29.The non-volatile memory device of claim 28 wherein theoxidation-resistant spacer comprises a material selected from the groupconsisting of silicon nitride and silicon oxynitride.
 30. Thenon-volatile memory device of claim 27 wherein the oxidation-resistantspacer comprises conductive nitride.
 31. The non-volatile memory deviceof claim 30 wherein the oxidation-resistant spacer comprises a materialselected from the group consisting of metal nitride, titanium nitride,tantalum nitride, and tungsten nitride.
 32. The non-volatile memorydevice of claim 1 wherein a height of the oxidation-resistant spacer isequal to a height of the control metal gate. 33.-70. (canceled)